JPH0570242B2 - - Google Patents

Info

Publication number
JPH0570242B2
JPH0570242B2 JP60128456A JP12845685A JPH0570242B2 JP H0570242 B2 JPH0570242 B2 JP H0570242B2 JP 60128456 A JP60128456 A JP 60128456A JP 12845685 A JP12845685 A JP 12845685A JP H0570242 B2 JPH0570242 B2 JP H0570242B2
Authority
JP
Japan
Prior art keywords
thin film
pbtio
solution
dielectric
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60128456A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61285609A (ja
Inventor
Akira Ariizumi
Ishio Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Soda Co Ltd
Original Assignee
Nippon Soda Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Soda Co Ltd filed Critical Nippon Soda Co Ltd
Priority to JP12845685A priority Critical patent/JPS61285609A/ja
Publication of JPS61285609A publication Critical patent/JPS61285609A/ja
Publication of JPH0570242B2 publication Critical patent/JPH0570242B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Chemically Coating (AREA)
  • Inorganic Insulating Materials (AREA)
JP12845685A 1985-06-13 1985-06-13 チタン酸鉛強誘電体薄膜およびその製造方法 Granted JPS61285609A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12845685A JPS61285609A (ja) 1985-06-13 1985-06-13 チタン酸鉛強誘電体薄膜およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12845685A JPS61285609A (ja) 1985-06-13 1985-06-13 チタン酸鉛強誘電体薄膜およびその製造方法

Publications (2)

Publication Number Publication Date
JPS61285609A JPS61285609A (ja) 1986-12-16
JPH0570242B2 true JPH0570242B2 (enrdf_load_stackoverflow) 1993-10-04

Family

ID=14985155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12845685A Granted JPS61285609A (ja) 1985-06-13 1985-06-13 チタン酸鉛強誘電体薄膜およびその製造方法

Country Status (1)

Country Link
JP (1) JPS61285609A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63239150A (ja) * 1987-03-27 1988-10-05 Sumitomo Electric Ind Ltd 超電導セラミツクス薄膜の製造方法
KR0147245B1 (ko) * 1993-12-01 1998-09-15 모리시타 요이찌 강유전체박막 및 그 제조방법
JP2622362B2 (ja) * 1993-12-01 1997-06-18 松下電器産業株式会社 強誘電体薄膜及びその製造方法
JP2642876B2 (ja) * 1994-08-11 1997-08-20 工業技術院長 チタン酸鉛系誘電体薄膜
JP3193302B2 (ja) 1996-06-26 2001-07-30 ティーディーケイ株式会社 膜構造体、電子デバイス、記録媒体および強誘電体薄膜の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59138004A (ja) * 1983-01-27 1984-08-08 松下電器産業株式会社 強誘電体薄膜
JPS59141427A (ja) * 1983-02-01 1984-08-14 Matsushita Electric Ind Co Ltd 強誘電体薄膜

Also Published As

Publication number Publication date
JPS61285609A (ja) 1986-12-16

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