JPS59207874A - 窒化珪素中空体の製造方法 - Google Patents
窒化珪素中空体の製造方法Info
- Publication number
- JPS59207874A JPS59207874A JP58081250A JP8125083A JPS59207874A JP S59207874 A JPS59207874 A JP S59207874A JP 58081250 A JP58081250 A JP 58081250A JP 8125083 A JP8125083 A JP 8125083A JP S59207874 A JPS59207874 A JP S59207874A
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- silicon
- surface layer
- hollow
- sintered body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58081250A JPS59207874A (ja) | 1983-05-10 | 1983-05-10 | 窒化珪素中空体の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58081250A JPS59207874A (ja) | 1983-05-10 | 1983-05-10 | 窒化珪素中空体の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59207874A true JPS59207874A (ja) | 1984-11-26 |
JPH0513906B2 JPH0513906B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-02-23 |
Family
ID=13741141
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58081250A Granted JPS59207874A (ja) | 1983-05-10 | 1983-05-10 | 窒化珪素中空体の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59207874A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4943401A (en) * | 1987-12-21 | 1990-07-24 | Eaton Corporation | Process for making silicon nitride articles |
US11729907B2 (en) | 2019-09-18 | 2023-08-15 | Kabushiki Kaisha Toshiba | Structure and circuit board |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5621749A (en) * | 1979-07-26 | 1981-02-28 | Mitsubishi Electric Corp | Detector for abnormality of tool |
JPS57200269A (en) * | 1981-06-05 | 1982-12-08 | Daido Steel Co Ltd | Manufacture of silicon nitrogen reaction sintered body |
-
1983
- 1983-05-10 JP JP58081250A patent/JPS59207874A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5621749A (en) * | 1979-07-26 | 1981-02-28 | Mitsubishi Electric Corp | Detector for abnormality of tool |
JPS57200269A (en) * | 1981-06-05 | 1982-12-08 | Daido Steel Co Ltd | Manufacture of silicon nitrogen reaction sintered body |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4943401A (en) * | 1987-12-21 | 1990-07-24 | Eaton Corporation | Process for making silicon nitride articles |
US11729907B2 (en) | 2019-09-18 | 2023-08-15 | Kabushiki Kaisha Toshiba | Structure and circuit board |
Also Published As
Publication number | Publication date |
---|---|
JPH0513906B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-02-23 |