JPS59205190A - 真空容器内で被加熱物を加熱する方法およびこの方法を実施するための装置 - Google Patents
真空容器内で被加熱物を加熱する方法およびこの方法を実施するための装置Info
- Publication number
- JPS59205190A JPS59205190A JP59079302A JP7930284A JPS59205190A JP S59205190 A JPS59205190 A JP S59205190A JP 59079302 A JP59079302 A JP 59079302A JP 7930284 A JP7930284 A JP 7930284A JP S59205190 A JPS59205190 A JP S59205190A
- Authority
- JP
- Japan
- Prior art keywords
- heated
- container
- heating
- anode
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 title claims description 26
- 238000000034 method Methods 0.000 title claims description 24
- 239000007789 gas Substances 0.000 claims description 15
- 239000001307 helium Substances 0.000 claims description 9
- 229910052734 helium Inorganic materials 0.000 claims description 9
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 9
- 229910052754 neon Inorganic materials 0.000 claims description 8
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims description 8
- 238000010891 electric arc Methods 0.000 claims description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 235000013399 edible fruits Nutrition 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 101000995861 Arabidopsis thaliana Regulatory protein NPR1 Proteins 0.000 description 1
- 229920000742 Cotton Polymers 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000003287 bathing Methods 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Physical Vapour Deposition (AREA)
- Discharge Heating (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH2080/83-5 | 1983-04-19 | ||
| CH208083 | 1983-04-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59205190A true JPS59205190A (ja) | 1984-11-20 |
| JPH0452600B2 JPH0452600B2 (es) | 1992-08-24 |
Family
ID=4225435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59079302A Granted JPS59205190A (ja) | 1983-04-19 | 1984-04-19 | 真空容器内で被加熱物を加熱する方法およびこの方法を実施するための装置 |
Country Status (9)
| Country | Link |
|---|---|
| JP (1) | JPS59205190A (es) |
| BE (1) | BE899450A (es) |
| DE (1) | DE3406953C2 (es) |
| ES (1) | ES8503428A1 (es) |
| FR (1) | FR2544952A1 (es) |
| GB (1) | GB2140199A (es) |
| IT (1) | IT1173487B (es) |
| NL (1) | NL8401070A (es) |
| SE (1) | SE8402168L (es) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4416525B4 (de) * | 1993-05-27 | 2008-06-05 | Oerlikon Trading Ag, Trübbach | Verfahren zur Herstellung einer Beschichtung erhöhter Verschleißfestigkeit auf Werkstückoberflächen, und dessen Verwendung |
| EP2623290A4 (en) | 2010-09-30 | 2015-01-28 | Asahi Kasei Chemicals Corp | SPLASHED OBJECT |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52103729A (en) * | 1976-02-26 | 1977-08-31 | Daido Steel Co Ltd | Plasma induction heating method and furnace |
| JPS5715309A (en) * | 1980-07-01 | 1982-01-26 | Matsushita Electric Ind Co Ltd | Dielectric porcelain composition |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3411035A (en) * | 1966-05-31 | 1968-11-12 | Gen Electric | Multi-chamber hollow cathode low voltage electron beam apparatus |
| GB1256887A (es) * | 1968-05-15 | 1971-12-15 | ||
| US4181504A (en) * | 1975-12-30 | 1980-01-01 | Technology Application Services Corp. | Method for the gasification of carbonaceous matter by plasma arc pyrolysis |
| DE3047602A1 (de) * | 1976-06-26 | 1982-07-22 | Leybold-Heraeus GmbH, 5000 Köln | Vorrichtung zum aufdampfen insbesondere sublimierbarer stoffe im vakuum mittels einer elektronenstrahlquelle |
| NL7607473A (nl) * | 1976-07-07 | 1978-01-10 | Philips Nv | Verstuifinrichting en werkwijze voor het ver- stuiven met een dergelijke inrichting. |
| CH631743A5 (de) * | 1977-06-01 | 1982-08-31 | Balzers Hochvakuum | Verfahren zum aufdampfen von material in einer vakuumaufdampfanlage. |
| GB1582707A (en) * | 1978-04-18 | 1981-01-14 | Gen Electric Co Ltd | Electron beam heating apparatus |
| US4234334A (en) * | 1979-01-10 | 1980-11-18 | Bethlehem Steel Corporation | Arc control in plasma arc reactors |
| CH645137A5 (de) * | 1981-03-13 | 1984-09-14 | Balzers Hochvakuum | Verfahren und vorrichtung zum verdampfen von material unter vakuum. |
| CH658545A5 (de) * | 1982-09-10 | 1986-11-14 | Balzers Hochvakuum | Verfahren zum gleichmaessigen erwaermen von heizgut in einem vakuumrezipienten. |
-
1984
- 1984-02-25 DE DE3406953A patent/DE3406953C2/de not_active Expired
- 1984-03-27 IT IT20239/84A patent/IT1173487B/it active
- 1984-03-27 ES ES531007A patent/ES8503428A1/es not_active Expired
- 1984-04-04 NL NL8401070A patent/NL8401070A/nl not_active Application Discontinuation
- 1984-04-10 FR FR8405663A patent/FR2544952A1/fr active Pending
- 1984-04-17 GB GB08409959A patent/GB2140199A/en not_active Withdrawn
- 1984-04-18 SE SE8402168A patent/SE8402168L/ not_active Application Discontinuation
- 1984-04-18 BE BE0/212788A patent/BE899450A/nl not_active IP Right Cessation
- 1984-04-19 JP JP59079302A patent/JPS59205190A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52103729A (en) * | 1976-02-26 | 1977-08-31 | Daido Steel Co Ltd | Plasma induction heating method and furnace |
| JPS5715309A (en) * | 1980-07-01 | 1982-01-26 | Matsushita Electric Ind Co Ltd | Dielectric porcelain composition |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3406953A1 (de) | 1984-10-25 |
| NL8401070A (nl) | 1984-11-16 |
| ES531007A0 (es) | 1985-02-16 |
| IT1173487B (it) | 1987-06-24 |
| GB2140199A (en) | 1984-11-21 |
| GB8409959D0 (en) | 1984-05-31 |
| ES8503428A1 (es) | 1985-02-16 |
| SE8402168L (sv) | 1984-10-20 |
| JPH0452600B2 (es) | 1992-08-24 |
| IT8420239A0 (it) | 1984-03-27 |
| BE899450A (nl) | 1984-10-18 |
| FR2544952A1 (fr) | 1984-10-26 |
| DE3406953C2 (de) | 1986-03-13 |
| SE8402168D0 (sv) | 1984-04-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI584331B (zh) | 用於產生帶電粒子束之電漿源裝置及方法 | |
| JP2995388B2 (ja) | イオン注入機に使用するイオン発生装置とその方法 | |
| US3133227A (en) | Linear particle accelerator apparatus for high energy particle beams provided with pulsing means for the control electrode | |
| JPS61138432A (ja) | 高周波プラズマ発生装置 | |
| JPS61190070A (ja) | スパツタ装置 | |
| US7965818B2 (en) | Field emission X-ray apparatus, methods, and systems | |
| US2163589A (en) | Electron tube | |
| JP6564556B2 (ja) | プラズマ処理装置 | |
| JPH03260065A (ja) | 内周面円筒状体のコーティング方法 | |
| US5055743A (en) | Induction heated cathode | |
| JPS59205190A (ja) | 真空容器内で被加熱物を加熱する方法およびこの方法を実施するための装置 | |
| TW201913713A (zh) | 用於等離子體處理設備的ｒｆ訊號傳遞裝置 | |
| US2252118A (en) | Electron tube | |
| US10916402B2 (en) | Electron beam irradiation device and electron beam irradiation method | |
| JPS6358747A (ja) | 電子顕微鏡 | |
| KR100246490B1 (ko) | 저전압 아크방전 및 가변자석에 의한 기판 가열방법 및 장치 | |
| US2394073A (en) | Electron accelerator | |
| US5334813A (en) | Metal inert gas welding system for use in vacuum | |
| JPH08185821A (ja) | イオンビーム発生装置のプラズマ加熱方法 | |
| US2130124A (en) | Electron discharge device | |
| JPS589981A (ja) | 真空蒸着装置 | |
| JP2568253B2 (ja) | 高周波誘導結合プラズマ質量分析装置 | |
| JPH01112639A (ja) | 金属イオン源 | |
| JPH02278639A (ja) | 電子銃装置 | |
| JPS5920751Y2 (ja) | 電子顕微鏡等の試料加熱装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |