JPS59198690A - セラミツクヒ−タ−及びその製造方法 - Google Patents
セラミツクヒ−タ−及びその製造方法Info
- Publication number
- JPS59198690A JPS59198690A JP7148483A JP7148483A JPS59198690A JP S59198690 A JPS59198690 A JP S59198690A JP 7148483 A JP7148483 A JP 7148483A JP 7148483 A JP7148483 A JP 7148483A JP S59198690 A JPS59198690 A JP S59198690A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic heater
- heating element
- ceramic
- shape
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims description 33
- 238000000034 method Methods 0.000 title claims description 21
- 238000010438 heat treatment Methods 0.000 claims description 28
- 239000000843 powder Substances 0.000 claims description 17
- 229910010293 ceramic material Inorganic materials 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 238000002844 melting Methods 0.000 claims description 8
- 238000005245 sintering Methods 0.000 claims description 7
- 239000011261 inert gas Substances 0.000 claims description 6
- 238000000465 moulding Methods 0.000 claims description 6
- 239000007769 metal material Substances 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 3
- 229910052575 non-oxide ceramic Inorganic materials 0.000 claims description 3
- 239000011225 non-oxide ceramic Substances 0.000 claims description 3
- 238000001272 pressureless sintering Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 7
- 230000008018 melting Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 238000002485 combustion reaction Methods 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000007731 hot pressing Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000003870 refractory metal Substances 0.000 description 2
- 239000011265 semifinished product Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 210000000988 bone and bone Anatomy 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000002470 thermal conductor Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7148483A JPS59198690A (ja) | 1983-04-25 | 1983-04-25 | セラミツクヒ−タ−及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7148483A JPS59198690A (ja) | 1983-04-25 | 1983-04-25 | セラミツクヒ−タ−及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59198690A true JPS59198690A (ja) | 1984-11-10 |
| JPH0547959B2 JPH0547959B2 (enrdf_load_html_response) | 1993-07-20 |
Family
ID=13461964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7148483A Granted JPS59198690A (ja) | 1983-04-25 | 1983-04-25 | セラミツクヒ−タ−及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59198690A (enrdf_load_html_response) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004111289A (ja) * | 2002-09-20 | 2004-04-08 | Sumitomo Electric Ind Ltd | セラミックスヒータ及びその製造方法 |
| JP2015015081A (ja) * | 2013-07-03 | 2015-01-22 | 住友電気工業株式会社 | 腐食性液体の加熱装置 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5293699A (en) * | 1976-01-29 | 1977-08-06 | Asea Ab | Process for preparing siliconnitride article |
| JPS54107914A (en) * | 1978-02-10 | 1979-08-24 | Tokyo Shibaura Electric Co | Production of high density silicon nitride base sintered body |
| JPS5527844A (en) * | 1978-08-16 | 1980-02-28 | Tokyo Shibaura Electric Co | Manufacture of silicon nitride sintered article |
| JPS5767296A (en) * | 1980-10-15 | 1982-04-23 | Kyoto Ceramic | Silicon nitride ceramic heater |
| JPS57114252U (enrdf_load_html_response) * | 1980-12-29 | 1982-07-15 | ||
| JPS57209887A (en) * | 1981-06-17 | 1982-12-23 | Kobe Steel Ltd | Method of sintering silicon nitride |
-
1983
- 1983-04-25 JP JP7148483A patent/JPS59198690A/ja active Granted
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5293699A (en) * | 1976-01-29 | 1977-08-06 | Asea Ab | Process for preparing siliconnitride article |
| JPS54107914A (en) * | 1978-02-10 | 1979-08-24 | Tokyo Shibaura Electric Co | Production of high density silicon nitride base sintered body |
| JPS5527844A (en) * | 1978-08-16 | 1980-02-28 | Tokyo Shibaura Electric Co | Manufacture of silicon nitride sintered article |
| JPS5767296A (en) * | 1980-10-15 | 1982-04-23 | Kyoto Ceramic | Silicon nitride ceramic heater |
| JPS57114252U (enrdf_load_html_response) * | 1980-12-29 | 1982-07-15 | ||
| JPS57209887A (en) * | 1981-06-17 | 1982-12-23 | Kobe Steel Ltd | Method of sintering silicon nitride |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004111289A (ja) * | 2002-09-20 | 2004-04-08 | Sumitomo Electric Ind Ltd | セラミックスヒータ及びその製造方法 |
| JP2015015081A (ja) * | 2013-07-03 | 2015-01-22 | 住友電気工業株式会社 | 腐食性液体の加熱装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0547959B2 (enrdf_load_html_response) | 1993-07-20 |
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