JPS59197153A - 半導体装置の製法 - Google Patents

半導体装置の製法

Info

Publication number
JPS59197153A
JPS59197153A JP4912584A JP4912584A JPS59197153A JP S59197153 A JPS59197153 A JP S59197153A JP 4912584 A JP4912584 A JP 4912584A JP 4912584 A JP4912584 A JP 4912584A JP S59197153 A JPS59197153 A JP S59197153A
Authority
JP
Japan
Prior art keywords
layer
film
oxide film
substrate
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4912584A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6141138B2 (cs
Inventor
Makoto Takechi
武智　真
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4912584A priority Critical patent/JPS59197153A/ja
Publication of JPS59197153A publication Critical patent/JPS59197153A/ja
Publication of JPS6141138B2 publication Critical patent/JPS6141138B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP4912584A 1984-03-16 1984-03-16 半導体装置の製法 Granted JPS59197153A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4912584A JPS59197153A (ja) 1984-03-16 1984-03-16 半導体装置の製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4912584A JPS59197153A (ja) 1984-03-16 1984-03-16 半導体装置の製法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP10658877A Division JPS5440580A (en) 1977-09-07 1977-09-07 Wiring contact structure of semiconductor device

Publications (2)

Publication Number Publication Date
JPS59197153A true JPS59197153A (ja) 1984-11-08
JPS6141138B2 JPS6141138B2 (cs) 1986-09-12

Family

ID=12822340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4912584A Granted JPS59197153A (ja) 1984-03-16 1984-03-16 半導体装置の製法

Country Status (1)

Country Link
JP (1) JPS59197153A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6330856U (cs) * 1986-08-12 1988-02-29

Also Published As

Publication number Publication date
JPS6141138B2 (cs) 1986-09-12

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