JPS59192945A - 配線パターン欠陥検出方法及びその装置 - Google Patents

配線パターン欠陥検出方法及びその装置

Info

Publication number
JPS59192945A
JPS59192945A JP58065659A JP6565983A JPS59192945A JP S59192945 A JPS59192945 A JP S59192945A JP 58065659 A JP58065659 A JP 58065659A JP 6565983 A JP6565983 A JP 6565983A JP S59192945 A JPS59192945 A JP S59192945A
Authority
JP
Japan
Prior art keywords
pattern
data
determination result
result obtained
enlargement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58065659A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0215819B2 (https=
Inventor
Takanori Ninomiya
隆典 二宮
Yasuo Nakagawa
中川　泰夫
Hiroya Saitou
斎藤　啓谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58065659A priority Critical patent/JPS59192945A/ja
Priority to DE8484104176T priority patent/DE3475106D1/de
Priority to EP84104176A priority patent/EP0123229B1/en
Priority to US06/600,957 priority patent/US4654583A/en
Publication of JPS59192945A publication Critical patent/JPS59192945A/ja
Publication of JPH0215819B2 publication Critical patent/JPH0215819B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
JP58065659A 1983-04-15 1983-04-15 配線パターン欠陥検出方法及びその装置 Granted JPS59192945A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP58065659A JPS59192945A (ja) 1983-04-15 1983-04-15 配線パターン欠陥検出方法及びその装置
DE8484104176T DE3475106D1 (en) 1983-04-15 1984-04-13 Method and apparatus for detecting defects of printed circuit patterns
EP84104176A EP0123229B1 (en) 1983-04-15 1984-04-13 Method and apparatus for detecting defects of printed circuit patterns
US06/600,957 US4654583A (en) 1983-04-15 1984-04-16 Method and apparatus for detecting defects of printed circuit patterns

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58065659A JPS59192945A (ja) 1983-04-15 1983-04-15 配線パターン欠陥検出方法及びその装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP1127793A Division JPH0235576A (ja) 1989-05-23 1989-05-23 配線パターン欠陥検出方法及び装置

Publications (2)

Publication Number Publication Date
JPS59192945A true JPS59192945A (ja) 1984-11-01
JPH0215819B2 JPH0215819B2 (https=) 1990-04-13

Family

ID=13293340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58065659A Granted JPS59192945A (ja) 1983-04-15 1983-04-15 配線パターン欠陥検出方法及びその装置

Country Status (1)

Country Link
JP (1) JPS59192945A (https=)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61293658A (ja) * 1985-06-21 1986-12-24 Matsushita Electric Works Ltd 半田付け外観検査方法
JPS6246205A (ja) * 1985-08-26 1987-02-28 Toshiba Corp Ｉｃリ−ドフレ−ムの検査方法
JPS62127987A (ja) * 1985-11-28 1987-06-10 Yokogawa Electric Corp プリント板パタ−ン検査方法
JPS62235550A (ja) * 1986-04-04 1987-10-15 Mitsubishi Metal Corp 欠陥検査方法
JPS63133694A (ja) * 1986-11-26 1988-06-06 ジューキ株式会社 厚膜回路形成における回路不良検出方法
JPH0271377A (ja) * 1988-09-07 1990-03-09 Hitachi Ltd パターン検査方法およびその装置
JPH02297198A (ja) * 1990-04-10 1990-12-07 Hitachi Ltd 配線パターン欠陥検出方法及び装置
JPH0613971U (ja) * 1992-03-04 1994-02-22 積水化成品工業株式会社 車輪止め
US5301248A (en) * 1987-11-09 1994-04-05 Hitachi, Ltd. Method for pattern inspection and apparatus therefor
JPH076012U (ja) * 1993-06-22 1995-01-27 オーテックス株式会社 山型車輪止めの固定構造
JPH07128256A (ja) * 1993-11-09 1995-05-19 Murata Mach Ltd パッケージの綾落ち糸検出方法
US5930382A (en) * 1995-05-15 1999-07-27 Hitachi, Ltd. Wiring pattern inspecting method and system for carrying out the same
US6072899A (en) * 1997-01-23 2000-06-06 Hitachi, Ltd. Method and device of inspecting three-dimensional shape defect

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61293658A (ja) * 1985-06-21 1986-12-24 Matsushita Electric Works Ltd 半田付け外観検査方法
JPS6246205A (ja) * 1985-08-26 1987-02-28 Toshiba Corp Ｉｃリ−ドフレ−ムの検査方法
JPS62127987A (ja) * 1985-11-28 1987-06-10 Yokogawa Electric Corp プリント板パタ−ン検査方法
JPS62235550A (ja) * 1986-04-04 1987-10-15 Mitsubishi Metal Corp 欠陥検査方法
JPS63133694A (ja) * 1986-11-26 1988-06-06 ジューキ株式会社 厚膜回路形成における回路不良検出方法
US5301248A (en) * 1987-11-09 1994-04-05 Hitachi, Ltd. Method for pattern inspection and apparatus therefor
JPH0271377A (ja) * 1988-09-07 1990-03-09 Hitachi Ltd パターン検査方法およびその装置
JPH02297198A (ja) * 1990-04-10 1990-12-07 Hitachi Ltd 配線パターン欠陥検出方法及び装置
JPH0613971U (ja) * 1992-03-04 1994-02-22 積水化成品工業株式会社 車輪止め
JPH076012U (ja) * 1993-06-22 1995-01-27 オーテックス株式会社 山型車輪止めの固定構造
JPH07128256A (ja) * 1993-11-09 1995-05-19 Murata Mach Ltd パッケージの綾落ち糸検出方法
US5930382A (en) * 1995-05-15 1999-07-27 Hitachi, Ltd. Wiring pattern inspecting method and system for carrying out the same
US6072899A (en) * 1997-01-23 2000-06-06 Hitachi, Ltd. Method and device of inspecting three-dimensional shape defect

Also Published As

Publication number Publication date
JPH0215819B2 (https=) 1990-04-13

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