JPS59191341A - 薄板材の搬送装置 - Google Patents

薄板材の搬送装置

Info

Publication number
JPS59191341A
JPS59191341A JP58065310A JP6531083A JPS59191341A JP S59191341 A JPS59191341 A JP S59191341A JP 58065310 A JP58065310 A JP 58065310A JP 6531083 A JP6531083 A JP 6531083A JP S59191341 A JPS59191341 A JP S59191341A
Authority
JP
Japan
Prior art keywords
wafer
heat treatment
plate material
treatment table
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58065310A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0263303B2 (enExample
Inventor
Noriaki Mori
森　教章
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP58065310A priority Critical patent/JPS59191341A/ja
Publication of JPS59191341A publication Critical patent/JPS59191341A/ja
Publication of JPH0263303B2 publication Critical patent/JPH0263303B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/7611—
    • H10P72/7612—
    • H10P72/7624—

Landscapes

  • Reciprocating Conveyors (AREA)
JP58065310A 1983-04-15 1983-04-15 薄板材の搬送装置 Granted JPS59191341A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58065310A JPS59191341A (ja) 1983-04-15 1983-04-15 薄板材の搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58065310A JPS59191341A (ja) 1983-04-15 1983-04-15 薄板材の搬送装置

Publications (2)

Publication Number Publication Date
JPS59191341A true JPS59191341A (ja) 1984-10-30
JPH0263303B2 JPH0263303B2 (enExample) 1990-12-27

Family

ID=13283201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58065310A Granted JPS59191341A (ja) 1983-04-15 1983-04-15 薄板材の搬送装置

Country Status (1)

Country Link
JP (1) JPS59191341A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142817A (ja) * 1986-12-05 1988-06-15 Tokyo Electron Ltd 基板の処理装置
JPH05267309A (ja) * 1992-03-19 1993-10-15 Ngk Insulators Ltd 加熱装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142817A (ja) * 1986-12-05 1988-06-15 Tokyo Electron Ltd 基板の処理装置
JPH05267309A (ja) * 1992-03-19 1993-10-15 Ngk Insulators Ltd 加熱装置

Also Published As

Publication number Publication date
JPH0263303B2 (enExample) 1990-12-27

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