JPS59190607A - 物体形状の非接触測定装置 - Google Patents

物体形状の非接触測定装置

Info

Publication number
JPS59190607A
JPS59190607A JP6621683A JP6621683A JPS59190607A JP S59190607 A JPS59190607 A JP S59190607A JP 6621683 A JP6621683 A JP 6621683A JP 6621683 A JP6621683 A JP 6621683A JP S59190607 A JPS59190607 A JP S59190607A
Authority
JP
Japan
Prior art keywords
displacement meter
axis
angle
measured
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6621683A
Other languages
English (en)
Japanese (ja)
Other versions
JPH022082B2 (enrdf_load_html_response
Inventor
Yusuke Takagi
勇輔 高木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6621683A priority Critical patent/JPS59190607A/ja
Publication of JPS59190607A publication Critical patent/JPS59190607A/ja
Publication of JPH022082B2 publication Critical patent/JPH022082B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP6621683A 1983-04-13 1983-04-13 物体形状の非接触測定装置 Granted JPS59190607A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6621683A JPS59190607A (ja) 1983-04-13 1983-04-13 物体形状の非接触測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6621683A JPS59190607A (ja) 1983-04-13 1983-04-13 物体形状の非接触測定装置

Publications (2)

Publication Number Publication Date
JPS59190607A true JPS59190607A (ja) 1984-10-29
JPH022082B2 JPH022082B2 (enrdf_load_html_response) 1990-01-16

Family

ID=13309407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6621683A Granted JPS59190607A (ja) 1983-04-13 1983-04-13 物体形状の非接触測定装置

Country Status (1)

Country Link
JP (1) JPS59190607A (enrdf_load_html_response)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61259109A (ja) * 1985-05-13 1986-11-17 Matsushita Electric Ind Co Ltd 光学距離計
JPS6255502A (ja) * 1985-09-04 1987-03-11 Toyota Auto Body Co Ltd 三次元測定機による物体形状の測定方法
US4721388A (en) * 1984-10-05 1988-01-26 Hitachi, Ltd. Method of measuring shape of object in non-contacting manner
US4778274A (en) * 1985-12-10 1988-10-18 Chuo Electric Manufacturing Co., Ltd. Noncontact measuring device for cylindrical, elongated objects bent into three-dimensional shapes
JPS63252211A (ja) * 1986-12-19 1988-10-19 ホンメルヴエルケ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 表面との間隔を無接触式に測定するための装置
US4893933A (en) * 1987-09-30 1990-01-16 Armco Inc. Automatic BOF vessel remaining lining profiler and method
JPH0336907U (enrdf_load_html_response) * 1989-08-21 1991-04-10
US5118192A (en) * 1990-07-11 1992-06-02 Robotic Vision Systems, Inc. System for 3-D inspection of objects
US5345687A (en) * 1990-07-25 1994-09-13 Fanuc, Ltd. Noncontact tracing control device
US5430547A (en) * 1992-04-07 1995-07-04 Honda Giken Kogyo Kabushiki Kaisha Non-contacting position detecting apparatus
KR100471273B1 (ko) * 2002-11-08 2005-03-08 현대자동차주식회사 휴대용 3차원 좌표 측정장치
JP2007046937A (ja) * 2005-08-08 2007-02-22 Tokyo Seimitsu Co Ltd 表面形状測定装置及び表面形状測定方法
JP2007101229A (ja) * 2005-09-30 2007-04-19 Konica Minolta Sensing Inc ３次元測定方法およびシステム並びにマニピュレータの制御方法および装置
JP2007198791A (ja) * 2006-01-24 2007-08-09 Mitsutoyo Corp 表面性状測定機
KR100867197B1 (ko) * 2002-01-07 2008-11-06 삼성코닝정밀유리 주식회사 다층막 코팅 유리의 두께 측정장치
KR100887566B1 (ko) 2007-06-07 2009-03-09 코리아테크노(주) 자동 검사장비의 마스크 촬영장치
KR101303050B1 (ko) * 2009-07-15 2013-09-04 주식회사 포스코 표면 검사 장치 및 이를 이용한 표면 검사 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5280148A (en) * 1975-12-26 1977-07-05 Mitsubishi Motors Corp Contactless measuring method and apparatus for same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5280148A (en) * 1975-12-26 1977-07-05 Mitsubishi Motors Corp Contactless measuring method and apparatus for same

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4721388A (en) * 1984-10-05 1988-01-26 Hitachi, Ltd. Method of measuring shape of object in non-contacting manner
JPS61259109A (ja) * 1985-05-13 1986-11-17 Matsushita Electric Ind Co Ltd 光学距離計
JPS6255502A (ja) * 1985-09-04 1987-03-11 Toyota Auto Body Co Ltd 三次元測定機による物体形状の測定方法
US4778274A (en) * 1985-12-10 1988-10-18 Chuo Electric Manufacturing Co., Ltd. Noncontact measuring device for cylindrical, elongated objects bent into three-dimensional shapes
JPS63252211A (ja) * 1986-12-19 1988-10-19 ホンメルヴエルケ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 表面との間隔を無接触式に測定するための装置
US4893933A (en) * 1987-09-30 1990-01-16 Armco Inc. Automatic BOF vessel remaining lining profiler and method
JPH0336907U (enrdf_load_html_response) * 1989-08-21 1991-04-10
US5118192A (en) * 1990-07-11 1992-06-02 Robotic Vision Systems, Inc. System for 3-D inspection of objects
US5345687A (en) * 1990-07-25 1994-09-13 Fanuc, Ltd. Noncontact tracing control device
US5430547A (en) * 1992-04-07 1995-07-04 Honda Giken Kogyo Kabushiki Kaisha Non-contacting position detecting apparatus
KR100867197B1 (ko) * 2002-01-07 2008-11-06 삼성코닝정밀유리 주식회사 다층막 코팅 유리의 두께 측정장치
KR100471273B1 (ko) * 2002-11-08 2005-03-08 현대자동차주식회사 휴대용 3차원 좌표 측정장치
JP2007046937A (ja) * 2005-08-08 2007-02-22 Tokyo Seimitsu Co Ltd 表面形状測定装置及び表面形状測定方法
JP2007101229A (ja) * 2005-09-30 2007-04-19 Konica Minolta Sensing Inc ３次元測定方法およびシステム並びにマニピュレータの制御方法および装置
JP2007198791A (ja) * 2006-01-24 2007-08-09 Mitsutoyo Corp 表面性状測定機
KR100887566B1 (ko) 2007-06-07 2009-03-09 코리아테크노(주) 자동 검사장비의 마스크 촬영장치
KR101303050B1 (ko) * 2009-07-15 2013-09-04 주식회사 포스코 표면 검사 장치 및 이를 이용한 표면 검사 방법

Also Published As

Publication number Publication date
JPH022082B2 (enrdf_load_html_response) 1990-01-16

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