JPS59182533A - ワイヤボンダ用ツ−ル - Google Patents

ワイヤボンダ用ツ−ル

Info

Publication number
JPS59182533A
JPS59182533A JP58055233A JP5523383A JPS59182533A JP S59182533 A JPS59182533 A JP S59182533A JP 58055233 A JP58055233 A JP 58055233A JP 5523383 A JP5523383 A JP 5523383A JP S59182533 A JPS59182533 A JP S59182533A
Authority
JP
Japan
Prior art keywords
wire
tool
gas
inert gas
ball
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58055233A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0218582B2 (cg-RX-API-DMAC10.html
Inventor
Hiroshi Ushiki
博 丑木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinkawa Ltd
Original Assignee
Shinkawa Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Ltd filed Critical Shinkawa Ltd
Priority to JP58055233A priority Critical patent/JPS59182533A/ja
Publication of JPS59182533A publication Critical patent/JPS59182533A/ja
Publication of JPH0218582B2 publication Critical patent/JPH0218582B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/0711—
    • H10W72/01551—
    • H10W72/07141—
    • H10W72/075—
    • H10W72/07511—
    • H10W72/07541—

Landscapes

  • Wire Bonding (AREA)
JP58055233A 1983-04-01 1983-04-01 ワイヤボンダ用ツ−ル Granted JPS59182533A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58055233A JPS59182533A (ja) 1983-04-01 1983-04-01 ワイヤボンダ用ツ−ル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58055233A JPS59182533A (ja) 1983-04-01 1983-04-01 ワイヤボンダ用ツ−ル

Publications (2)

Publication Number Publication Date
JPS59182533A true JPS59182533A (ja) 1984-10-17
JPH0218582B2 JPH0218582B2 (cg-RX-API-DMAC10.html) 1990-04-26

Family

ID=12992880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58055233A Granted JPS59182533A (ja) 1983-04-01 1983-04-01 ワイヤボンダ用ツ−ル

Country Status (1)

Country Link
JP (1) JPS59182533A (cg-RX-API-DMAC10.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8186562B1 (en) * 2010-12-14 2012-05-29 Asm Technology Singapore Pte Ltd Apparatus for increasing coverage of shielding gas during wire bonding
CN108981374A (zh) * 2018-08-10 2018-12-11 德淮半导体有限公司 晶圆烘干机

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5574044U (cg-RX-API-DMAC10.html) * 1978-11-13 1980-05-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5574044U (cg-RX-API-DMAC10.html) * 1978-11-13 1980-05-21

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8186562B1 (en) * 2010-12-14 2012-05-29 Asm Technology Singapore Pte Ltd Apparatus for increasing coverage of shielding gas during wire bonding
US20120145770A1 (en) * 2010-12-14 2012-06-14 Song Keng Yew James Apparatus for increasing coverage of shielding gas during wire bonding
CN108981374A (zh) * 2018-08-10 2018-12-11 德淮半导体有限公司 晶圆烘干机

Also Published As

Publication number Publication date
JPH0218582B2 (cg-RX-API-DMAC10.html) 1990-04-26

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