JPS59180313A - 表面検査装置 - Google Patents

表面検査装置

Info

Publication number
JPS59180313A
JPS59180313A JP5268883A JP5268883A JPS59180313A JP S59180313 A JPS59180313 A JP S59180313A JP 5268883 A JP5268883 A JP 5268883A JP 5268883 A JP5268883 A JP 5268883A JP S59180313 A JPS59180313 A JP S59180313A
Authority
JP
Japan
Prior art keywords
turntable
data
inspected
light
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5268883A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0358042B2 (cg-RX-API-DMAC10.html
Inventor
Hiroshi Yamaji
山地　廣
Shigeru Ogawa
茂 小川
Masaaki Kano
加納　正明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP5268883A priority Critical patent/JPS59180313A/ja
Publication of JPS59180313A publication Critical patent/JPS59180313A/ja
Publication of JPH0358042B2 publication Critical patent/JPH0358042B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP5268883A 1983-03-30 1983-03-30 表面検査装置 Granted JPS59180313A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5268883A JPS59180313A (ja) 1983-03-30 1983-03-30 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5268883A JPS59180313A (ja) 1983-03-30 1983-03-30 表面検査装置

Publications (2)

Publication Number Publication Date
JPS59180313A true JPS59180313A (ja) 1984-10-13
JPH0358042B2 JPH0358042B2 (cg-RX-API-DMAC10.html) 1991-09-04

Family

ID=12921824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5268883A Granted JPS59180313A (ja) 1983-03-30 1983-03-30 表面検査装置

Country Status (1)

Country Link
JP (1) JPS59180313A (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07143817A (ja) * 1994-08-10 1995-06-06 Kubota Corp 脱穀装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2373957B1 (en) * 2009-01-06 2020-04-01 Siemens Healthcare Diagnostics Inc. Methods for determining a liquid level in a container using imaging

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5328772U (cg-RX-API-DMAC10.html) * 1976-08-18 1978-03-11
JPS56126747A (en) * 1980-03-12 1981-10-05 Hitachi Ltd Inspecting method for flaw, alien substance and the like on surface of sample and device therefor
JPS57161642A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for defect of surface

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5328772U (cg-RX-API-DMAC10.html) * 1976-08-18 1978-03-11
JPS56126747A (en) * 1980-03-12 1981-10-05 Hitachi Ltd Inspecting method for flaw, alien substance and the like on surface of sample and device therefor
JPS57161642A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for defect of surface

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07143817A (ja) * 1994-08-10 1995-06-06 Kubota Corp 脱穀装置

Also Published As

Publication number Publication date
JPH0358042B2 (cg-RX-API-DMAC10.html) 1991-09-04

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