JPS59177940U - 洗浄装置 - Google Patents
洗浄装置Info
- Publication number
- JPS59177940U JPS59177940U JP7261383U JP7261383U JPS59177940U JP S59177940 U JPS59177940 U JP S59177940U JP 7261383 U JP7261383 U JP 7261383U JP 7261383 U JP7261383 U JP 7261383U JP S59177940 U JPS59177940 U JP S59177940U
- Authority
- JP
- Japan
- Prior art keywords
- cleaned
- cleaning equipment
- cleaning
- samples
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7261383U JPS59177940U (ja) | 1983-05-16 | 1983-05-16 | 洗浄装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7261383U JPS59177940U (ja) | 1983-05-16 | 1983-05-16 | 洗浄装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59177940U true JPS59177940U (ja) | 1984-11-28 |
JPS645881Y2 JPS645881Y2 (enrdf_load_stackoverflow) | 1989-02-14 |
Family
ID=30202748
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7261383U Granted JPS59177940U (ja) | 1983-05-16 | 1983-05-16 | 洗浄装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59177940U (enrdf_load_stackoverflow) |
-
1983
- 1983-05-16 JP JP7261383U patent/JPS59177940U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS645881Y2 (enrdf_load_stackoverflow) | 1989-02-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS59177940U (ja) | 洗浄装置 | |
JPS59148290U (ja) | ロボツトハンドの爪交換装置 | |
JPS60111041U (ja) | 半導体ウエ−ハの洗浄装置 | |
JPS58114042U (ja) | シリコンウエハ−の洗浄装置 | |
JPS6064926U (ja) | ウエハ搬送装置 | |
JPS5941124U (ja) | 洗浄装置 | |
JPS5981034U (ja) | ウエハ搬送装置 | |
JPS6068640U (ja) | 半導体ウエ−ハ超音波洗浄装置 | |
JPS59164593U (ja) | 洗浄用具 | |
JPS59172357U (ja) | 自動分析装置の試料吸引ノズル | |
JPS5884613U (ja) | 薄膜磁気ヘツド用磁性体基板の洗浄装置 | |
JPS58166962U (ja) | はんだ槽の酸化物除去装置 | |
JPS5927060U (ja) | ガラス拭き具 | |
JPS6094842U (ja) | 半導体基板用研削装置 | |
JPS6067828U (ja) | 加工物保持具 | |
JPS6025141U (ja) | 洗浄ノズル | |
JPS58155833U (ja) | 回転式半導体ウエハ−洗浄装置 | |
JPS60187534U (ja) | 自動洗浄装置 | |
JPS59193514U (ja) | 自動搬送設備における空気清浄装置 | |
JPS58426U (ja) | ダイシング装置 | |
JPS583033U (ja) | ウエハ−洗浄装置 | |
JPS59122127U (ja) | しゆびんのホルダ− | |
JPS59192836U (ja) | ジエツトスクラバ−装置の載置台 | |
JPS6039242U (ja) | 液処理装置 | |
JPS6051015U (ja) | ウエハのスクライブ装置 |