JPS59177940U - cleaning equipment - Google Patents
cleaning equipmentInfo
- Publication number
- JPS59177940U JPS59177940U JP7261383U JP7261383U JPS59177940U JP S59177940 U JPS59177940 U JP S59177940U JP 7261383 U JP7261383 U JP 7261383U JP 7261383 U JP7261383 U JP 7261383U JP S59177940 U JPS59177940 U JP S59177940U
- Authority
- JP
- Japan
- Prior art keywords
- cleaned
- cleaning equipment
- cleaning
- samples
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
、゛ 第１図は従来のマスク洗浄の一例を示す概要図、
第２図はマスクホルダーを示す斜視図、第３図は洗浄後
におけるマスク上の汚染残渣を示す斜視図、第４図は本
考案の一実施例である洗浄機構を示す側面図、第５図は
本考案の一実施例である噴出ノズル形状を示す斜視図、
第６図は本考案の他の実施例である洗浄ノズル形状を示
す斜視図である。
図中、１１・・・試料（半導体基板又はマスク）、１２
・・・ホルダー、１３・・・ノズル、１４・・・純水供
給導管、１５・・・噴出孔。
第Ｚ１習,゛ Figure 1 is a schematic diagram showing an example of conventional mask cleaning.
Fig. 2 is a perspective view showing the mask holder, Fig. 3 is a perspective view showing contamination residue on the mask after cleaning, Fig. 4 is a side view showing the cleaning mechanism that is an embodiment of the present invention, and Fig. 5 is a perspective view showing the shape of a jet nozzle which is an embodiment of the present invention;
FIG. 6 is a perspective view showing the shape of a cleaning nozzle according to another embodiment of the present invention. In the figure, 11...sample (semiconductor substrate or mask), 12
... Holder, 13... Nozzle, 14... Pure water supply conduit, 15... Spout hole. Lesson Z1
Claims (1)
試料間の空間に延在する洗浄ノズルを具備し、それぞれ
の該被洗浄試料の両面を同時に洗浄できる様にしたこと
を特徴とする洗浄装置。It is characterized by comprising a holder for holding a plurality of plate-shaped samples to be cleaned, and a cleaning nozzle extending into the space between the samples to be cleaned, so that both sides of each sample to be cleaned can be cleaned at the same time. cleaning equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7261383U JPS59177940U (en) | 1983-05-16 | 1983-05-16 | cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7261383U JPS59177940U (en) | 1983-05-16 | 1983-05-16 | cleaning equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59177940U true JPS59177940U (en) | 1984-11-28 |
| JPS645881Y2 JPS645881Y2 (en) | 1989-02-14 |
Family
ID=30202748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7261383U Granted JPS59177940U (en) | 1983-05-16 | 1983-05-16 | cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59177940U (en) |
-
1983
- 1983-05-16 JP JP7261383U patent/JPS59177940U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS645881Y2 (en) | 1989-02-14 |
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