JPS59177940U - 洗浄装置 - Google Patents

洗浄装置

Info

Publication number
JPS59177940U
JPS59177940U JP7261383U JP7261383U JPS59177940U JP S59177940 U JPS59177940 U JP S59177940U JP 7261383 U JP7261383 U JP 7261383U JP 7261383 U JP7261383 U JP 7261383U JP S59177940 U JPS59177940 U JP S59177940U
Authority
JP
Japan
Prior art keywords
cleaned
cleaning equipment
cleaning
samples
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7261383U
Other languages
English (en)
Japanese (ja)
Other versions
JPS645881Y2 (cg-RX-API-DMAC7.html
Inventor
小林　美勝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7261383U priority Critical patent/JPS59177940U/ja
Publication of JPS59177940U publication Critical patent/JPS59177940U/ja
Application granted granted Critical
Publication of JPS645881Y2 publication Critical patent/JPS645881Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP7261383U 1983-05-16 1983-05-16 洗浄装置 Granted JPS59177940U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7261383U JPS59177940U (ja) 1983-05-16 1983-05-16 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7261383U JPS59177940U (ja) 1983-05-16 1983-05-16 洗浄装置

Publications (2)

Publication Number Publication Date
JPS59177940U true JPS59177940U (ja) 1984-11-28
JPS645881Y2 JPS645881Y2 (cg-RX-API-DMAC7.html) 1989-02-14

Family

ID=30202748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7261383U Granted JPS59177940U (ja) 1983-05-16 1983-05-16 洗浄装置

Country Status (1)

Country Link
JP (1) JPS59177940U (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPS645881Y2 (cg-RX-API-DMAC7.html) 1989-02-14

Similar Documents

Publication Publication Date Title
JPS59177940U (ja) 洗浄装置
JPS59148290U (ja) ロボツトハンドの爪交換装置
JPS60111041U (ja) 半導体ウエ−ハの洗浄装置
JPS58114042U (ja) シリコンウエハ−の洗浄装置
JPS6064926U (ja) ウエハ搬送装置
JPS5941124U (ja) 洗浄装置
JPS5981034U (ja) ウエハ搬送装置
JPS6068640U (ja) 半導体ウエ−ハ超音波洗浄装置
JPS59164593U (ja) 洗浄用具
JPS59172357U (ja) 自動分析装置の試料吸引ノズル
JPS5884613U (ja) 薄膜磁気ヘツド用磁性体基板の洗浄装置
JPS58166962U (ja) はんだ槽の酸化物除去装置
JPS5927060U (ja) ガラス拭き具
JPS6094842U (ja) 半導体基板用研削装置
JPS6067828U (ja) 加工物保持具
JPS6025141U (ja) 洗浄ノズル
JPS58155833U (ja) 回転式半導体ウエハ−洗浄装置
JPS60187534U (ja) 自動洗浄装置
JPS58426U (ja) ダイシング装置
JPS6092824U (ja) 液相エピタキシヤル成長装置
JPS59192836U (ja) ジエツトスクラバ−装置の載置台
JPS6039242U (ja) 液処理装置
JPS6051015U (ja) ウエハのスクライブ装置
JPS6036626U (ja) 眼鏡等の清掃具
JPS6045642U (ja) 工作機械のチヤツククリ−ニング装置