JPS59170753A - 電子線回折装置 - Google Patents

電子線回折装置

Info

Publication number
JPS59170753A
JPS59170753A JP58045062A JP4506283A JPS59170753A JP S59170753 A JPS59170753 A JP S59170753A JP 58045062 A JP58045062 A JP 58045062A JP 4506283 A JP4506283 A JP 4506283A JP S59170753 A JPS59170753 A JP S59170753A
Authority
JP
Japan
Prior art keywords
lens
electron beam
excitation
objective lens
change
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58045062A
Other languages
English (en)
Japanese (ja)
Other versions
JPH04336B2 (enrdf_load_stackoverflow
Inventor
Takeshi Tomita
健 富田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP58045062A priority Critical patent/JPS59170753A/ja
Publication of JPS59170753A publication Critical patent/JPS59170753A/ja
Publication of JPH04336B2 publication Critical patent/JPH04336B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP58045062A 1983-03-17 1983-03-17 電子線回折装置 Granted JPS59170753A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58045062A JPS59170753A (ja) 1983-03-17 1983-03-17 電子線回折装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58045062A JPS59170753A (ja) 1983-03-17 1983-03-17 電子線回折装置

Publications (2)

Publication Number Publication Date
JPS59170753A true JPS59170753A (ja) 1984-09-27
JPH04336B2 JPH04336B2 (enrdf_load_stackoverflow) 1992-01-07

Family

ID=12708864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58045062A Granted JPS59170753A (ja) 1983-03-17 1983-03-17 電子線回折装置

Country Status (1)

Country Link
JP (1) JPS59170753A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018221457A1 (ja) 2017-05-31 2018-12-06 富士フイルム株式会社 感光性樹脂組成物、ポリマー前駆体、硬化膜、積層体、硬化膜の製造方法および半導体デバイス

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51124371A (en) * 1975-04-23 1976-10-29 Jeol Ltd Scanning type electron microscope and similar equipment provided with means for controlling opening angle of electron beam for irradiating s amples
JPS51138064U (enrdf_load_stackoverflow) * 1975-04-28 1976-11-08
JPS55128243A (en) * 1979-03-28 1980-10-03 Hitachi Ltd Electron microscope
JPS57212755A (en) * 1981-06-25 1982-12-27 Internatl Precision Inc Transmission-type electron microscope
JPS5825055A (ja) * 1981-07-16 1983-02-15 Jeol Ltd 電子顕微鏡

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51124371A (en) * 1975-04-23 1976-10-29 Jeol Ltd Scanning type electron microscope and similar equipment provided with means for controlling opening angle of electron beam for irradiating s amples
JPS51138064U (enrdf_load_stackoverflow) * 1975-04-28 1976-11-08
JPS55128243A (en) * 1979-03-28 1980-10-03 Hitachi Ltd Electron microscope
JPS57212755A (en) * 1981-06-25 1982-12-27 Internatl Precision Inc Transmission-type electron microscope
JPS5825055A (ja) * 1981-07-16 1983-02-15 Jeol Ltd 電子顕微鏡

Also Published As

Publication number Publication date
JPH04336B2 (enrdf_load_stackoverflow) 1992-01-07

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