JPS59160564U - 化学気相成長装置 - Google Patents

化学気相成長装置

Info

Publication number
JPS59160564U
JPS59160564U JP5600883U JP5600883U JPS59160564U JP S59160564 U JPS59160564 U JP S59160564U JP 5600883 U JP5600883 U JP 5600883U JP 5600883 U JP5600883 U JP 5600883U JP S59160564 U JPS59160564 U JP S59160564U
Authority
JP
Japan
Prior art keywords
susceptor
chemical vapor
vapor deposition
movable part
deposition apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5600883U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6142920Y2 (cg-RX-API-DMAC7.html
Inventor
後藤　泰山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP5600883U priority Critical patent/JPS59160564U/ja
Publication of JPS59160564U publication Critical patent/JPS59160564U/ja
Application granted granted Critical
Publication of JPS6142920Y2 publication Critical patent/JPS6142920Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP5600883U 1983-04-14 1983-04-14 化学気相成長装置 Granted JPS59160564U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5600883U JPS59160564U (ja) 1983-04-14 1983-04-14 化学気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5600883U JPS59160564U (ja) 1983-04-14 1983-04-14 化学気相成長装置

Publications (2)

Publication Number Publication Date
JPS59160564U true JPS59160564U (ja) 1984-10-27
JPS6142920Y2 JPS6142920Y2 (cg-RX-API-DMAC7.html) 1986-12-05

Family

ID=30186333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5600883U Granted JPS59160564U (ja) 1983-04-14 1983-04-14 化学気相成長装置

Country Status (1)

Country Link
JP (1) JPS59160564U (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61132595A (ja) * 1984-11-28 1986-06-20 Toshiba Corp 有機金属熱分解気相結晶成長装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61132595A (ja) * 1984-11-28 1986-06-20 Toshiba Corp 有機金属熱分解気相結晶成長装置

Also Published As

Publication number Publication date
JPS6142920Y2 (cg-RX-API-DMAC7.html) 1986-12-05

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