JPS59154313A - 距離および傾斜角測定装置 - Google Patents

距離および傾斜角測定装置

Info

Publication number
JPS59154313A
JPS59154313A JP2857783A JP2857783A JPS59154313A JP S59154313 A JPS59154313 A JP S59154313A JP 2857783 A JP2857783 A JP 2857783A JP 2857783 A JP2857783 A JP 2857783A JP S59154313 A JPS59154313 A JP S59154313A
Authority
JP
Japan
Prior art keywords
measured
distance
lense
image
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2857783A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0139041B2 (fr
Inventor
Atsushi Yoshikawa
淳 吉川
Tsutomu Kamiyama
勉 上山
Shinichi Nagata
永田　信一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP2857783A priority Critical patent/JPS59154313A/ja
Publication of JPS59154313A publication Critical patent/JPS59154313A/ja
Publication of JPH0139041B2 publication Critical patent/JPH0139041B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP2857783A 1983-02-24 1983-02-24 距離および傾斜角測定装置 Granted JPS59154313A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2857783A JPS59154313A (ja) 1983-02-24 1983-02-24 距離および傾斜角測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2857783A JPS59154313A (ja) 1983-02-24 1983-02-24 距離および傾斜角測定装置

Publications (2)

Publication Number Publication Date
JPS59154313A true JPS59154313A (ja) 1984-09-03
JPH0139041B2 JPH0139041B2 (fr) 1989-08-17

Family

ID=12252453

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2857783A Granted JPS59154313A (ja) 1983-02-24 1983-02-24 距離および傾斜角測定装置

Country Status (1)

Country Link
JP (1) JPS59154313A (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6271803A (ja) * 1985-09-26 1987-04-02 Yokogawa Electric Corp 変位変換器
JPS6275303A (ja) * 1985-09-30 1987-04-07 Yokogawa Electric Corp 変位変換器
JPH01138403A (ja) * 1987-11-25 1989-05-31 Konica Corp 変位・傾き測定装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4824647B2 (ja) * 2007-08-06 2011-11-30 株式会社神戸製鋼所 平坦度測定方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6271803A (ja) * 1985-09-26 1987-04-02 Yokogawa Electric Corp 変位変換器
JPS6275303A (ja) * 1985-09-30 1987-04-07 Yokogawa Electric Corp 変位変換器
JPH01138403A (ja) * 1987-11-25 1989-05-31 Konica Corp 変位・傾き測定装置

Also Published As

Publication number Publication date
JPH0139041B2 (fr) 1989-08-17

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