JPH0139041B2 - - Google Patents
Info
- Publication number
- JPH0139041B2 JPH0139041B2 JP2857783A JP2857783A JPH0139041B2 JP H0139041 B2 JPH0139041 B2 JP H0139041B2 JP 2857783 A JP2857783 A JP 2857783A JP 2857783 A JP2857783 A JP 2857783A JP H0139041 B2 JPH0139041 B2 JP H0139041B2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- distance
- lens
- position sensor
- dimensional
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000005219 brazing Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2857783A JPS59154313A (ja) | 1983-02-24 | 1983-02-24 | 距離および傾斜角測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2857783A JPS59154313A (ja) | 1983-02-24 | 1983-02-24 | 距離および傾斜角測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59154313A JPS59154313A (ja) | 1984-09-03 |
| JPH0139041B2 true JPH0139041B2 (fr) | 1989-08-17 |
Family
ID=12252453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2857783A Granted JPS59154313A (ja) | 1983-02-24 | 1983-02-24 | 距離および傾斜角測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59154313A (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007286072A (ja) * | 2007-08-06 | 2007-11-01 | Kobe Steel Ltd | 平坦度測定方法及びその装置 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0697163B2 (ja) * | 1985-09-26 | 1994-11-30 | 横河電機株式会社 | 変位変換器 |
| JPH0619244B2 (ja) * | 1985-09-30 | 1994-03-16 | 横河電機株式会社 | 変位変換器 |
| JPH07104128B2 (ja) * | 1987-11-25 | 1995-11-13 | コニカ株式会社 | 変位・傾き測定装置 |
-
1983
- 1983-02-24 JP JP2857783A patent/JPS59154313A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007286072A (ja) * | 2007-08-06 | 2007-11-01 | Kobe Steel Ltd | 平坦度測定方法及びその装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59154313A (ja) | 1984-09-03 |
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