JPS59147023A - 金属薄膜の製造方法 - Google Patents

金属薄膜の製造方法

Info

Publication number
JPS59147023A
JPS59147023A JP58020613A JP2061383A JPS59147023A JP S59147023 A JPS59147023 A JP S59147023A JP 58020613 A JP58020613 A JP 58020613A JP 2061383 A JP2061383 A JP 2061383A JP S59147023 A JPS59147023 A JP S59147023A
Authority
JP
Japan
Prior art keywords
thin film
metal thin
substrate
cylindrical
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58020613A
Other languages
English (en)
Japanese (ja)
Other versions
JPH024675B2 (cs
Inventor
Fumiaki Ueno
植野　文章
Ryuji Sugita
龍二 杉田
Kazuyoshi Honda
和義 本田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58020613A priority Critical patent/JPS59147023A/ja
Publication of JPS59147023A publication Critical patent/JPS59147023A/ja
Publication of JPH024675B2 publication Critical patent/JPH024675B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP58020613A 1983-02-10 1983-02-10 金属薄膜の製造方法 Granted JPS59147023A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58020613A JPS59147023A (ja) 1983-02-10 1983-02-10 金属薄膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58020613A JPS59147023A (ja) 1983-02-10 1983-02-10 金属薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPS59147023A true JPS59147023A (ja) 1984-08-23
JPH024675B2 JPH024675B2 (cs) 1990-01-30

Family

ID=12032104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58020613A Granted JPS59147023A (ja) 1983-02-10 1983-02-10 金属薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS59147023A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6318063A (ja) * 1986-07-10 1988-01-25 Nippon Kokan Kk <Nkk> 真空蒸着方法
JPS6318064A (ja) * 1986-07-10 1988-01-25 Nippon Kokan Kk <Nkk> 真空蒸着方法
JP2013036104A (ja) * 2011-08-10 2013-02-21 Toray Advanced Film Co Ltd 薄膜形成方法および薄膜形成装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010163693A (ja) * 2010-04-12 2010-07-29 Ulvac Japan Ltd 巻取式真空蒸着方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6318063A (ja) * 1986-07-10 1988-01-25 Nippon Kokan Kk <Nkk> 真空蒸着方法
JPS6318064A (ja) * 1986-07-10 1988-01-25 Nippon Kokan Kk <Nkk> 真空蒸着方法
JP2013036104A (ja) * 2011-08-10 2013-02-21 Toray Advanced Film Co Ltd 薄膜形成方法および薄膜形成装置

Also Published As

Publication number Publication date
JPH024675B2 (cs) 1990-01-30

Similar Documents

Publication Publication Date Title
EP0447550B1 (en) Method for producing a metallized film for laminated chip capacitors
US4393091A (en) Method of vacuum depositing a layer on a plastic film substrate
JPS59147023A (ja) 金属薄膜の製造方法
ATE117156T1 (de) Dünnschichtleitende vorrichtung und verfahren zu ihrer herstellung.
JPS59147026A (ja) 金属薄膜の製造方法
JPS6130669A (ja) 金属薄膜の製造方法
CN1975944B (zh) 薄膜层叠体和电子元件
JPS62207867A (ja) 金属薄膜の製造方法
JPS6059069A (ja) 金属薄膜の製造方法
JPS59149931A (ja) 金属薄膜の製造方法
JPS6358623A (ja) 金属薄膜の製造装置
JPS63109167A (ja) 金属薄膜の製造装置
JPS63307258A (ja) 金属薄膜の製造方法
JPS63213659A (ja) 金属薄膜の製造装置
JPH02239428A (ja) 金属薄膜の製造方法
JPS5897823A (ja) 金属化フイルムコンデンサの製造方法
JPS63105967A (ja) 金属薄膜の製造装置
JPS59147024A (ja) 金属薄膜の製造方法
JPS63255362A (ja) 金属薄膜の製造装置
JPS63310959A (ja) 金属薄膜の製造方法
JPS63306531A (ja) 金属薄膜の製造方法
JPH0499164A (ja) オイルマスク用蒸発器
JPS63310955A (ja) 金属薄膜の蒸着装置
JPS5844687A (ja) コロナ放電処理用電極
JPS59172163A (ja) 垂直磁気記録媒体の製造方法