JPS59145577A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS59145577A
JPS59145577A JP59009341A JP934184A JPS59145577A JP S59145577 A JPS59145577 A JP S59145577A JP 59009341 A JP59009341 A JP 59009341A JP 934184 A JP934184 A JP 934184A JP S59145577 A JPS59145577 A JP S59145577A
Authority
JP
Japan
Prior art keywords
type region
semiconductor device
silicon
type
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59009341A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6353712B2 (enExample
Inventor
Toru Kobayashi
小林徹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP59009341A priority Critical patent/JPS59145577A/ja
Publication of JPS59145577A publication Critical patent/JPS59145577A/ja
Publication of JPS6353712B2 publication Critical patent/JPS6353712B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes

Landscapes

  • Formation Of Insulating Films (AREA)
  • Electrodes Of Semiconductors (AREA)
JP59009341A 1984-01-20 1984-01-20 半導体装置の製造方法 Granted JPS59145577A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59009341A JPS59145577A (ja) 1984-01-20 1984-01-20 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59009341A JPS59145577A (ja) 1984-01-20 1984-01-20 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP422976A Division JPS5287375A (en) 1976-01-17 1976-01-17 Semiconductor device and its production

Publications (2)

Publication Number Publication Date
JPS59145577A true JPS59145577A (ja) 1984-08-21
JPS6353712B2 JPS6353712B2 (enExample) 1988-10-25

Family

ID=11717766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59009341A Granted JPS59145577A (ja) 1984-01-20 1984-01-20 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS59145577A (enExample)

Also Published As

Publication number Publication date
JPS6353712B2 (enExample) 1988-10-25

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