JPS59139688A - 酸化物薄膜の熱処理方法 - Google Patents
酸化物薄膜の熱処理方法Info
- Publication number
- JPS59139688A JPS59139688A JP58012854A JP1285483A JPS59139688A JP S59139688 A JPS59139688 A JP S59139688A JP 58012854 A JP58012854 A JP 58012854A JP 1285483 A JP1285483 A JP 1285483A JP S59139688 A JPS59139688 A JP S59139688A
- Authority
- JP
- Japan
- Prior art keywords
- bpb
- powders
- heat treatment
- thin film
- thin films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 28
- 238000010438 heat treatment Methods 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title claims abstract description 17
- 239000000843 powder Substances 0.000 claims abstract description 29
- 229910000464 lead oxide Inorganic materials 0.000 claims abstract description 9
- YEXPOXQUZXUXJW-UHFFFAOYSA-N lead(II) oxide Inorganic materials [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 claims abstract description 7
- 238000004544 sputter deposition Methods 0.000 claims abstract description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 3
- 239000001301 oxygen Substances 0.000 claims abstract description 3
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 3
- 229910016063 BaPb Inorganic materials 0.000 claims description 2
- 239000013081 microcrystal Substances 0.000 abstract description 17
- 239000010408 film Substances 0.000 abstract description 15
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 10
- HTUMBQDCCIXGCV-UHFFFAOYSA-N lead oxide Chemical compound [O-2].[Pb+2] HTUMBQDCCIXGCV-UHFFFAOYSA-N 0.000 abstract description 10
- XMFOQHDPRMAJNU-UHFFFAOYSA-N lead(II,IV) oxide Inorganic materials O1[Pb]O[Pb]11O[Pb]O1 XMFOQHDPRMAJNU-UHFFFAOYSA-N 0.000 abstract description 9
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 abstract description 8
- 229910001882 dioxygen Inorganic materials 0.000 abstract description 8
- 238000001556 precipitation Methods 0.000 abstract description 7
- YADSGOSSYOOKMP-UHFFFAOYSA-N lead dioxide Inorganic materials O=[Pb]=O YADSGOSSYOOKMP-UHFFFAOYSA-N 0.000 abstract description 4
- 238000007669 thermal treatment Methods 0.000 abstract 3
- 238000011282 treatment Methods 0.000 abstract 2
- 239000002887 superconductor Substances 0.000 description 8
- 238000007796 conventional method Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58012854A JPS59139688A (ja) | 1983-01-31 | 1983-01-31 | 酸化物薄膜の熱処理方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58012854A JPS59139688A (ja) | 1983-01-31 | 1983-01-31 | 酸化物薄膜の熱処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59139688A true JPS59139688A (ja) | 1984-08-10 |
| JPS6341231B2 JPS6341231B2 (enrdf_load_stackoverflow) | 1988-08-16 |
Family
ID=11816982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58012854A Granted JPS59139688A (ja) | 1983-01-31 | 1983-01-31 | 酸化物薄膜の熱処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59139688A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63190713A (ja) * | 1987-01-30 | 1988-08-08 | Hitachi Ltd | 酸化物超伝導材料 |
| JPH01294565A (ja) * | 1988-05-20 | 1989-11-28 | Meidensha Corp | 超電導体の焼成容器 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE68907209T2 (de) * | 1988-09-28 | 1994-02-03 | Oki Electric Ind Co Ltd | Verfahren zur herstellung eines supraleitfähigen dünnfilmes. |
-
1983
- 1983-01-31 JP JP58012854A patent/JPS59139688A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63190713A (ja) * | 1987-01-30 | 1988-08-08 | Hitachi Ltd | 酸化物超伝導材料 |
| JPH01294565A (ja) * | 1988-05-20 | 1989-11-28 | Meidensha Corp | 超電導体の焼成容器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6341231B2 (enrdf_load_stackoverflow) | 1988-08-16 |
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