JPS59119734A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS59119734A
JPS59119734A JP57226519A JP22651982A JPS59119734A JP S59119734 A JPS59119734 A JP S59119734A JP 57226519 A JP57226519 A JP 57226519A JP 22651982 A JP22651982 A JP 22651982A JP S59119734 A JPS59119734 A JP S59119734A
Authority
JP
Japan
Prior art keywords
film
substrate
cracks
atmosphere
ta2o5
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57226519A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0462171B2 (enrdf_load_stackoverflow
Inventor
Hitoshi Hasegawa
長谷川　斉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57226519A priority Critical patent/JPS59119734A/ja
Publication of JPS59119734A publication Critical patent/JPS59119734A/ja
Publication of JPH0462171B2 publication Critical patent/JPH0462171B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Formation Of Insulating Films (AREA)
  • Semiconductor Memories (AREA)
JP57226519A 1982-12-25 1982-12-25 半導体装置の製造方法 Granted JPS59119734A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57226519A JPS59119734A (ja) 1982-12-25 1982-12-25 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57226519A JPS59119734A (ja) 1982-12-25 1982-12-25 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS59119734A true JPS59119734A (ja) 1984-07-11
JPH0462171B2 JPH0462171B2 (enrdf_load_stackoverflow) 1992-10-05

Family

ID=16846397

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57226519A Granted JPS59119734A (ja) 1982-12-25 1982-12-25 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS59119734A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7115533B2 (en) 2001-12-18 2006-10-03 Matsushita Electric Industrial Co., Ltd. Semiconductor device manufacturing method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4927985A (enrdf_load_stackoverflow) * 1972-07-12 1974-03-12
JPS53108373A (en) * 1977-03-04 1978-09-21 Hitachi Ltd Manufacture for semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4927985A (enrdf_load_stackoverflow) * 1972-07-12 1974-03-12
JPS53108373A (en) * 1977-03-04 1978-09-21 Hitachi Ltd Manufacture for semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7115533B2 (en) 2001-12-18 2006-10-03 Matsushita Electric Industrial Co., Ltd. Semiconductor device manufacturing method

Also Published As

Publication number Publication date
JPH0462171B2 (enrdf_load_stackoverflow) 1992-10-05

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