JPS59114828A - 酸化シリコン膜の製造方法 - Google Patents

酸化シリコン膜の製造方法

Info

Publication number
JPS59114828A
JPS59114828A JP57223053A JP22305382A JPS59114828A JP S59114828 A JPS59114828 A JP S59114828A JP 57223053 A JP57223053 A JP 57223053A JP 22305382 A JP22305382 A JP 22305382A JP S59114828 A JPS59114828 A JP S59114828A
Authority
JP
Japan
Prior art keywords
film
substrate
temperature
spattering
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57223053A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0223030B2 (OSRAM
Inventor
Toshiaki Miyajima
利明 宮嶋
Masayoshi Koba
木場　正義
Atsushi Kudo
淳 工藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP57223053A priority Critical patent/JPS59114828A/ja
Publication of JPS59114828A publication Critical patent/JPS59114828A/ja
Publication of JPH0223030B2 publication Critical patent/JPH0223030B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/60—

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP57223053A 1982-12-21 1982-12-21 酸化シリコン膜の製造方法 Granted JPS59114828A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57223053A JPS59114828A (ja) 1982-12-21 1982-12-21 酸化シリコン膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57223053A JPS59114828A (ja) 1982-12-21 1982-12-21 酸化シリコン膜の製造方法

Publications (2)

Publication Number Publication Date
JPS59114828A true JPS59114828A (ja) 1984-07-03
JPH0223030B2 JPH0223030B2 (OSRAM) 1990-05-22

Family

ID=16792093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57223053A Granted JPS59114828A (ja) 1982-12-21 1982-12-21 酸化シリコン膜の製造方法

Country Status (1)

Country Link
JP (1) JPS59114828A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61236127A (ja) * 1985-04-12 1986-10-21 Internatl Rectifier Corp Japan Ltd 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61236127A (ja) * 1985-04-12 1986-10-21 Internatl Rectifier Corp Japan Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0223030B2 (OSRAM) 1990-05-22

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