JPS59100143A - 合成樹脂製品のプラズマ処理装置 - Google Patents

合成樹脂製品のプラズマ処理装置

Info

Publication number
JPS59100143A
JPS59100143A JP21016882A JP21016882A JPS59100143A JP S59100143 A JPS59100143 A JP S59100143A JP 21016882 A JP21016882 A JP 21016882A JP 21016882 A JP21016882 A JP 21016882A JP S59100143 A JPS59100143 A JP S59100143A
Authority
JP
Japan
Prior art keywords
plasma
reaction chamber
treated
pipe
shower
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21016882A
Other languages
English (en)
Japanese (ja)
Other versions
JPH033700B2 (de
Inventor
Takaoki Kaneko
金子　隆興
Kenji Fukuda
賢治 福田
Yoshinobu Takahashi
芳信 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP21016882A priority Critical patent/JPS59100143A/ja
Publication of JPS59100143A publication Critical patent/JPS59100143A/ja
Publication of JPH033700B2 publication Critical patent/JPH033700B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP21016882A 1982-11-30 1982-11-30 合成樹脂製品のプラズマ処理装置 Granted JPS59100143A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21016882A JPS59100143A (ja) 1982-11-30 1982-11-30 合成樹脂製品のプラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21016882A JPS59100143A (ja) 1982-11-30 1982-11-30 合成樹脂製品のプラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS59100143A true JPS59100143A (ja) 1984-06-09
JPH033700B2 JPH033700B2 (de) 1991-01-21

Family

ID=16584892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21016882A Granted JPS59100143A (ja) 1982-11-30 1982-11-30 合成樹脂製品のプラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS59100143A (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0120307A2 (de) * 1983-02-25 1984-10-03 Toyota Jidosha Kabushiki Kaisha Vorrichtung und Verfahren zur Plasmabehandlung von Kunstharz
JPS62101634A (ja) * 1985-10-30 1987-05-12 Hashimoto Forming Co Ltd 装飾用モールディングの製造方法
JP2000073029A (ja) * 1998-08-26 2000-03-07 Nitto Denko Corp 粘着部材及びその製造方法
KR20210020042A (ko) 2018-06-08 2021-02-23 쇼와덴코머티리얼즈가부시끼가이샤 점착 시트의 제조 방법, 다이싱·다이본딩 일체형 테이프의 제조 방법, 반도체 장치의 제조 방법, 점착제의 처리 방법, 피착체의 고정화 방법, 및 피착체의 박리 방법

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0120307A2 (de) * 1983-02-25 1984-10-03 Toyota Jidosha Kabushiki Kaisha Vorrichtung und Verfahren zur Plasmabehandlung von Kunstharz
EP0120307A3 (en) * 1983-02-25 1989-05-03 Toyota Jidosha Kabushiki Kaisha Apparatus and method for plasma treatment of resin material
JPS62101634A (ja) * 1985-10-30 1987-05-12 Hashimoto Forming Co Ltd 装飾用モールディングの製造方法
JPH0378418B2 (de) * 1985-10-30 1991-12-13 Hashimoto Forming Kogyo Co
JP2000073029A (ja) * 1998-08-26 2000-03-07 Nitto Denko Corp 粘着部材及びその製造方法
KR20210020042A (ko) 2018-06-08 2021-02-23 쇼와덴코머티리얼즈가부시끼가이샤 점착 시트의 제조 방법, 다이싱·다이본딩 일체형 테이프의 제조 방법, 반도체 장치의 제조 방법, 점착제의 처리 방법, 피착체의 고정화 방법, 및 피착체의 박리 방법

Also Published As

Publication number Publication date
JPH033700B2 (de) 1991-01-21

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