JPS589954B2 - リズムハツセイソウチ - Google Patents
リズムハツセイソウチInfo
- Publication number
- JPS589954B2 JPS589954B2 JP50025139A JP2513975A JPS589954B2 JP S589954 B2 JPS589954 B2 JP S589954B2 JP 50025139 A JP50025139 A JP 50025139A JP 2513975 A JP2513975 A JP 2513975A JP S589954 B2 JPS589954 B2 JP S589954B2
- Authority
- JP
- Japan
- Prior art keywords
- output
- clock signal
- input
- counting
- tempo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000033764 rhythmic process Effects 0.000 title claims description 9
- 238000010586 diagram Methods 0.000 description 7
- 239000003990 capacitor Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 210000000056 organ Anatomy 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Landscapes
- Electrophonic Musical Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50025139A JPS589954B2 (ja) | 1975-02-28 | 1975-02-28 | リズムハツセイソウチ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50025139A JPS589954B2 (ja) | 1975-02-28 | 1975-02-28 | リズムハツセイソウチ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51100712A JPS51100712A (show.php) | 1976-09-06 |
| JPS589954B2 true JPS589954B2 (ja) | 1983-02-23 |
Family
ID=12157631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50025139A Expired JPS589954B2 (ja) | 1975-02-28 | 1975-02-28 | リズムハツセイソウチ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS589954B2 (show.php) |
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-
1975
- 1975-02-28 JP JP50025139A patent/JPS589954B2/ja not_active Expired
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| Publication number | Publication date |
|---|---|
| JPS51100712A (show.php) | 1976-09-06 |
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