JPS5897846A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5897846A
JPS5897846A JP56197273A JP19727381A JPS5897846A JP S5897846 A JPS5897846 A JP S5897846A JP 56197273 A JP56197273 A JP 56197273A JP 19727381 A JP19727381 A JP 19727381A JP S5897846 A JPS5897846 A JP S5897846A
Authority
JP
Japan
Prior art keywords
oxide film
region
buried
silicon
oxidation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56197273A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6222266B2 (enExample
Inventor
Fujiki Tokuyoshi
徳吉　藤樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56197273A priority Critical patent/JPS5897846A/ja
Publication of JPS5897846A publication Critical patent/JPS5897846A/ja
Publication of JPS6222266B2 publication Critical patent/JPS6222266B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/011—
    • H10W10/10—

Landscapes

  • Element Separation (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Bipolar Transistors (AREA)
JP56197273A 1981-12-08 1981-12-08 半導体装置の製造方法 Granted JPS5897846A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56197273A JPS5897846A (ja) 1981-12-08 1981-12-08 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56197273A JPS5897846A (ja) 1981-12-08 1981-12-08 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5897846A true JPS5897846A (ja) 1983-06-10
JPS6222266B2 JPS6222266B2 (enExample) 1987-05-16

Family

ID=16371718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56197273A Granted JPS5897846A (ja) 1981-12-08 1981-12-08 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5897846A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63289830A (ja) * 1987-05-21 1988-11-28 Nec Corp 半導体装置の製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0762944A (ja) * 1993-08-31 1995-03-07 Ota Seisakusho:Kk スライドヒンジ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63289830A (ja) * 1987-05-21 1988-11-28 Nec Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6222266B2 (enExample) 1987-05-16

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