JPS589416A - 水晶振動子用容器の製造方法 - Google Patents

水晶振動子用容器の製造方法

Info

Publication number
JPS589416A
JPS589416A JP10799881A JP10799881A JPS589416A JP S589416 A JPS589416 A JP S589416A JP 10799881 A JP10799881 A JP 10799881A JP 10799881 A JP10799881 A JP 10799881A JP S589416 A JPS589416 A JP S589416A
Authority
JP
Japan
Prior art keywords
glass
crystal
tin oxide
etching
case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10799881A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0129086B2 (enrdf_load_stackoverflow
Inventor
Eiji Togawa
戸川　栄司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP10799881A priority Critical patent/JPS589416A/ja
Publication of JPS589416A publication Critical patent/JPS589416A/ja
Publication of JPH0129086B2 publication Critical patent/JPH0129086B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP10799881A 1981-07-09 1981-07-09 水晶振動子用容器の製造方法 Granted JPS589416A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10799881A JPS589416A (ja) 1981-07-09 1981-07-09 水晶振動子用容器の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10799881A JPS589416A (ja) 1981-07-09 1981-07-09 水晶振動子用容器の製造方法

Publications (2)

Publication Number Publication Date
JPS589416A true JPS589416A (ja) 1983-01-19
JPH0129086B2 JPH0129086B2 (enrdf_load_stackoverflow) 1989-06-07

Family

ID=14473385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10799881A Granted JPS589416A (ja) 1981-07-09 1981-07-09 水晶振動子用容器の製造方法

Country Status (1)

Country Link
JP (1) JPS589416A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04211275A (ja) * 1989-12-20 1992-08-03 Dx Imaging Inc 静電液体現像剤
JP5162675B2 (ja) * 2008-11-28 2013-03-13 セイコーインスツル株式会社 圧電振動子の製造方法、並びに圧電振動子、発振器、電子機器及び電波時計

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04211275A (ja) * 1989-12-20 1992-08-03 Dx Imaging Inc 静電液体現像剤
JP5162675B2 (ja) * 2008-11-28 2013-03-13 セイコーインスツル株式会社 圧電振動子の製造方法、並びに圧電振動子、発振器、電子機器及び電波時計
US8638180B2 (en) 2008-11-28 2014-01-28 Sii Crystal Technology Inc. Piezoelectric vibrator manufacturing method, piezoelectric vibrator, oscillator, electronic device, and radio-controlled timepiece

Also Published As

Publication number Publication date
JPH0129086B2 (enrdf_load_stackoverflow) 1989-06-07

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