JPS589336A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS589336A
JPS589336A JP56107134A JP10713481A JPS589336A JP S589336 A JPS589336 A JP S589336A JP 56107134 A JP56107134 A JP 56107134A JP 10713481 A JP10713481 A JP 10713481A JP S589336 A JPS589336 A JP S589336A
Authority
JP
Japan
Prior art keywords
film
thin film
substrate
oxide film
silicon oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56107134A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0221136B2 (enExample
Inventor
Katsuya Okumura
勝弥 奥村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56107134A priority Critical patent/JPS589336A/ja
Publication of JPS589336A publication Critical patent/JPS589336A/ja
Publication of JPH0221136B2 publication Critical patent/JPH0221136B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/011—
    • H10W10/10—

Landscapes

  • Drying Of Semiconductors (AREA)
  • Element Separation (AREA)
  • Local Oxidation Of Silicon (AREA)
JP56107134A 1981-07-10 1981-07-10 半導体装置の製造方法 Granted JPS589336A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56107134A JPS589336A (ja) 1981-07-10 1981-07-10 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56107134A JPS589336A (ja) 1981-07-10 1981-07-10 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS589336A true JPS589336A (ja) 1983-01-19
JPH0221136B2 JPH0221136B2 (enExample) 1990-05-11

Family

ID=14451360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56107134A Granted JPS589336A (ja) 1981-07-10 1981-07-10 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS589336A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5382566A (en) * 1992-05-29 1995-01-17 Sumitomo Electric Industries, Ltd. Josephson junction device formed of oxide superconductor and process for preparing the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5259589A (en) * 1975-11-11 1977-05-17 Matsushita Electric Ind Co Ltd Production of semiconductor device
JPS5368080A (en) * 1976-11-29 1978-06-17 Fujitsu Ltd Manufacture of semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5259589A (en) * 1975-11-11 1977-05-17 Matsushita Electric Ind Co Ltd Production of semiconductor device
JPS5368080A (en) * 1976-11-29 1978-06-17 Fujitsu Ltd Manufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5382566A (en) * 1992-05-29 1995-01-17 Sumitomo Electric Industries, Ltd. Josephson junction device formed of oxide superconductor and process for preparing the same
US5525582A (en) * 1992-05-29 1996-06-11 Sumitomo Electric Industries, Ltd. Josephson junction device formed of oxide superconductor and process for preparing the same

Also Published As

Publication number Publication date
JPH0221136B2 (enExample) 1990-05-11

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