JPH0221136B2 - - Google Patents

Info

Publication number
JPH0221136B2
JPH0221136B2 JP56107134A JP10713481A JPH0221136B2 JP H0221136 B2 JPH0221136 B2 JP H0221136B2 JP 56107134 A JP56107134 A JP 56107134A JP 10713481 A JP10713481 A JP 10713481A JP H0221136 B2 JPH0221136 B2 JP H0221136B2
Authority
JP
Japan
Prior art keywords
film
oxide film
thin film
silicon oxide
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56107134A
Other languages
English (en)
Japanese (ja)
Other versions
JPS589336A (ja
Inventor
Katsuya Okumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP56107134A priority Critical patent/JPS589336A/ja
Publication of JPS589336A publication Critical patent/JPS589336A/ja
Publication of JPH0221136B2 publication Critical patent/JPH0221136B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/011—
    • H10W10/10—

Landscapes

  • Drying Of Semiconductors (AREA)
  • Element Separation (AREA)
  • Local Oxidation Of Silicon (AREA)
JP56107134A 1981-07-10 1981-07-10 半導体装置の製造方法 Granted JPS589336A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56107134A JPS589336A (ja) 1981-07-10 1981-07-10 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56107134A JPS589336A (ja) 1981-07-10 1981-07-10 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS589336A JPS589336A (ja) 1983-01-19
JPH0221136B2 true JPH0221136B2 (enExample) 1990-05-11

Family

ID=14451360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56107134A Granted JPS589336A (ja) 1981-07-10 1981-07-10 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS589336A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05335638A (ja) * 1992-05-29 1993-12-17 Sumitomo Electric Ind Ltd ジョセフソン接合構造体およびその作製方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5259589A (en) * 1975-11-11 1977-05-17 Matsushita Electric Ind Co Ltd Production of semiconductor device
JPS5368080A (en) * 1976-11-29 1978-06-17 Fujitsu Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS589336A (ja) 1983-01-19

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