JPS5889869A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5889869A
JPS5889869A JP56187631A JP18763181A JPS5889869A JP S5889869 A JPS5889869 A JP S5889869A JP 56187631 A JP56187631 A JP 56187631A JP 18763181 A JP18763181 A JP 18763181A JP S5889869 A JPS5889869 A JP S5889869A
Authority
JP
Japan
Prior art keywords
film
polysilicon
oxide film
insulating film
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56187631A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6312389B2 (enrdf_load_stackoverflow
Inventor
Jun Fukuchi
福地　順
Ichizo Kamei
亀井　市蔵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp, Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electronics Corp
Priority to JP56187631A priority Critical patent/JPS5889869A/ja
Publication of JPS5889869A publication Critical patent/JPS5889869A/ja
Publication of JPS6312389B2 publication Critical patent/JPS6312389B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
  • Solid State Image Pick-Up Elements (AREA)
JP56187631A 1981-11-20 1981-11-20 半導体装置の製造方法 Granted JPS5889869A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56187631A JPS5889869A (ja) 1981-11-20 1981-11-20 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56187631A JPS5889869A (ja) 1981-11-20 1981-11-20 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5889869A true JPS5889869A (ja) 1983-05-28
JPS6312389B2 JPS6312389B2 (enrdf_load_stackoverflow) 1988-03-18

Family

ID=16209485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56187631A Granted JPS5889869A (ja) 1981-11-20 1981-11-20 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5889869A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60198855A (ja) * 1984-03-23 1985-10-08 Nec Corp 半導体集積回路装置の製造方法
JPS615574A (ja) * 1984-06-20 1986-01-11 Hitachi Micro Comput Eng Ltd 半導体装置の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5394780A (en) * 1977-01-14 1978-08-19 Hitachi Ltd Manufacture of semiconductor device
JPS558062A (en) * 1978-07-03 1980-01-21 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor
JPS5559778A (en) * 1978-10-30 1980-05-06 Chiyou Lsi Gijutsu Kenkyu Kumiai Method of fabricating semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5394780A (en) * 1977-01-14 1978-08-19 Hitachi Ltd Manufacture of semiconductor device
JPS558062A (en) * 1978-07-03 1980-01-21 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor
JPS5559778A (en) * 1978-10-30 1980-05-06 Chiyou Lsi Gijutsu Kenkyu Kumiai Method of fabricating semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60198855A (ja) * 1984-03-23 1985-10-08 Nec Corp 半導体集積回路装置の製造方法
JPS615574A (ja) * 1984-06-20 1986-01-11 Hitachi Micro Comput Eng Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6312389B2 (enrdf_load_stackoverflow) 1988-03-18

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