JPS5888108A - 窒化珪素粉末の製造法 - Google Patents

窒化珪素粉末の製造法

Info

Publication number
JPS5888108A
JPS5888108A JP18303981A JP18303981A JPS5888108A JP S5888108 A JPS5888108 A JP S5888108A JP 18303981 A JP18303981 A JP 18303981A JP 18303981 A JP18303981 A JP 18303981A JP S5888108 A JPS5888108 A JP S5888108A
Authority
JP
Japan
Prior art keywords
silicon
nitriding
nitrogen
reaction
silicon nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18303981A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6335563B2 (en, 2012
Inventor
Shinji Osada
長田　真司
Kiyoshi Kasai
笠井　清
Takaaki Tsukidate
月館　隆明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tosoh Corp
Original Assignee
Toyo Soda Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Soda Manufacturing Co Ltd filed Critical Toyo Soda Manufacturing Co Ltd
Priority to JP18303981A priority Critical patent/JPS5888108A/ja
Publication of JPS5888108A publication Critical patent/JPS5888108A/ja
Publication of JPS6335563B2 publication Critical patent/JPS6335563B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP18303981A 1981-11-17 1981-11-17 窒化珪素粉末の製造法 Granted JPS5888108A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18303981A JPS5888108A (ja) 1981-11-17 1981-11-17 窒化珪素粉末の製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18303981A JPS5888108A (ja) 1981-11-17 1981-11-17 窒化珪素粉末の製造法

Publications (2)

Publication Number Publication Date
JPS5888108A true JPS5888108A (ja) 1983-05-26
JPS6335563B2 JPS6335563B2 (en, 2012) 1988-07-15

Family

ID=16128664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18303981A Granted JPS5888108A (ja) 1981-11-17 1981-11-17 窒化珪素粉末の製造法

Country Status (1)

Country Link
JP (1) JPS5888108A (en, 2012)

Also Published As

Publication number Publication date
JPS6335563B2 (en, 2012) 1988-07-15

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