JPH0511047B2 - - Google Patents

Info

Publication number
JPH0511047B2
JPH0511047B2 JP63107684A JP10768488A JPH0511047B2 JP H0511047 B2 JPH0511047 B2 JP H0511047B2 JP 63107684 A JP63107684 A JP 63107684A JP 10768488 A JP10768488 A JP 10768488A JP H0511047 B2 JPH0511047 B2 JP H0511047B2
Authority
JP
Japan
Prior art keywords
silicon nitride
cmhn
gas
reaction
metals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63107684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01278405A (ja
Inventor
Isao Imai
Toshiji Ishii
Koichi Sueyoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP10768488A priority Critical patent/JPH01278405A/ja
Publication of JPH01278405A publication Critical patent/JPH01278405A/ja
Publication of JPH0511047B2 publication Critical patent/JPH0511047B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Catalysts (AREA)
JP10768488A 1988-05-02 1988-05-02 針状晶窒化ケイ素の製造方法 Granted JPH01278405A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10768488A JPH01278405A (ja) 1988-05-02 1988-05-02 針状晶窒化ケイ素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10768488A JPH01278405A (ja) 1988-05-02 1988-05-02 針状晶窒化ケイ素の製造方法

Publications (2)

Publication Number Publication Date
JPH01278405A JPH01278405A (ja) 1989-11-08
JPH0511047B2 true JPH0511047B2 (en, 2012) 1993-02-12

Family

ID=14465348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10768488A Granted JPH01278405A (ja) 1988-05-02 1988-05-02 針状晶窒化ケイ素の製造方法

Country Status (1)

Country Link
JP (1) JPH01278405A (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5814290A (en) * 1995-07-24 1998-09-29 Hyperion Catalysis International Silicon nitride nanowhiskers and method of making same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5673603A (en) * 1979-11-14 1981-06-18 Toshiba Corp Manufacture of silicon nitride
JPH0791043B2 (ja) * 1986-12-26 1995-10-04 東芝セラミツクス株式会社 窒化ケイ素の製造方法

Also Published As

Publication number Publication date
JPH01278405A (ja) 1989-11-08

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