JPS5880135A - 磁気記録媒体の製造方法および同装置 - Google Patents
磁気記録媒体の製造方法および同装置Info
- Publication number
- JPS5880135A JPS5880135A JP17884681A JP17884681A JPS5880135A JP S5880135 A JPS5880135 A JP S5880135A JP 17884681 A JP17884681 A JP 17884681A JP 17884681 A JP17884681 A JP 17884681A JP S5880135 A JPS5880135 A JP S5880135A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- cans
- rotary
- magnetic recording
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000000034 method Methods 0.000 title description 3
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 230000005294 ferromagnetic effect Effects 0.000 claims description 11
- 238000007740 vapor deposition Methods 0.000 claims description 8
- 229920000642 polymer Polymers 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 abstract description 4
- 238000000151 deposition Methods 0.000 abstract description 3
- 230000002093 peripheral effect Effects 0.000 abstract description 2
- 230000015572 biosynthetic process Effects 0.000 abstract 2
- 239000003302 ferromagnetic material Substances 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 15
- 239000010408 film Substances 0.000 description 11
- 238000004804 winding Methods 0.000 description 7
- 238000007796 conventional method Methods 0.000 description 4
- 238000005566 electron beam evaporation Methods 0.000 description 4
- 239000011241 protective layer Substances 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 3
- -1 Polyethylene terephthalate Polymers 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 240000008564 Boehmeria nivea Species 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 241000283984 Rodentia Species 0.000 description 1
- 101150062705 Wipf3 gene Proteins 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000001017 electron-beam sputter deposition Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/85—Coating a support with a magnetic layer by vapour deposition
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17884681A JPS5880135A (ja) | 1981-11-06 | 1981-11-06 | 磁気記録媒体の製造方法および同装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17884681A JPS5880135A (ja) | 1981-11-06 | 1981-11-06 | 磁気記録媒体の製造方法および同装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5880135A true JPS5880135A (ja) | 1983-05-14 |
| JPH0319620B2 JPH0319620B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-03-15 |
Family
ID=16055688
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17884681A Granted JPS5880135A (ja) | 1981-11-06 | 1981-11-06 | 磁気記録媒体の製造方法および同装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5880135A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57167137A (en) * | 1981-04-06 | 1982-10-14 | Olympus Optical Co Ltd | Formation for thin film |
-
1981
- 1981-11-06 JP JP17884681A patent/JPS5880135A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57167137A (en) * | 1981-04-06 | 1982-10-14 | Olympus Optical Co Ltd | Formation for thin film |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0319620B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-03-15 |