JPS5879852U - 電子顕微鏡等に於けるシヤツタ−装置 - Google Patents

電子顕微鏡等に於けるシヤツタ−装置

Info

Publication number
JPS5879852U
JPS5879852U JP17153081U JP17153081U JPS5879852U JP S5879852 U JPS5879852 U JP S5879852U JP 17153081 U JP17153081 U JP 17153081U JP 17153081 U JP17153081 U JP 17153081U JP S5879852 U JPS5879852 U JP S5879852U
Authority
JP
Japan
Prior art keywords
shutter device
electron microscope
electron beam
optical axis
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17153081U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6247168Y2 (https=
Inventor
洋一 小原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP17153081U priority Critical patent/JPS5879852U/ja
Publication of JPS5879852U publication Critical patent/JPS5879852U/ja
Application granted granted Critical
Publication of JPS6247168Y2 publication Critical patent/JPS6247168Y2/ja
Granted legal-status Critical Current

Links

JP17153081U 1981-11-18 1981-11-18 電子顕微鏡等に於けるシヤツタ−装置 Granted JPS5879852U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17153081U JPS5879852U (ja) 1981-11-18 1981-11-18 電子顕微鏡等に於けるシヤツタ−装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17153081U JPS5879852U (ja) 1981-11-18 1981-11-18 電子顕微鏡等に於けるシヤツタ−装置

Publications (2)

Publication Number Publication Date
JPS5879852U true JPS5879852U (ja) 1983-05-30
JPS6247168Y2 JPS6247168Y2 (https=) 1987-12-25

Family

ID=29963449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17153081U Granted JPS5879852U (ja) 1981-11-18 1981-11-18 電子顕微鏡等に於けるシヤツタ−装置

Country Status (1)

Country Link
JP (1) JPS5879852U (https=)

Also Published As

Publication number Publication date
JPS6247168Y2 (https=) 1987-12-25

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