JPS6247168Y2 - - Google Patents
Info
- Publication number
- JPS6247168Y2 JPS6247168Y2 JP17153081U JP17153081U JPS6247168Y2 JP S6247168 Y2 JPS6247168 Y2 JP S6247168Y2 JP 17153081 U JP17153081 U JP 17153081U JP 17153081 U JP17153081 U JP 17153081U JP S6247168 Y2 JPS6247168 Y2 JP S6247168Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- shield
- shutter
- optical axis
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 58
- 230000003287 optical effect Effects 0.000 claims description 21
- 239000004020 conductor Substances 0.000 claims description 17
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17153081U JPS5879852U (ja) | 1981-11-18 | 1981-11-18 | 電子顕微鏡等に於けるシヤツタ−装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17153081U JPS5879852U (ja) | 1981-11-18 | 1981-11-18 | 電子顕微鏡等に於けるシヤツタ−装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5879852U JPS5879852U (ja) | 1983-05-30 |
| JPS6247168Y2 true JPS6247168Y2 (https=) | 1987-12-25 |
Family
ID=29963449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17153081U Granted JPS5879852U (ja) | 1981-11-18 | 1981-11-18 | 電子顕微鏡等に於けるシヤツタ−装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5879852U (https=) |
-
1981
- 1981-11-18 JP JP17153081U patent/JPS5879852U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5879852U (ja) | 1983-05-30 |
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