JPS5878470A - 半導体圧力検出装置 - Google Patents

半導体圧力検出装置

Info

Publication number
JPS5878470A
JPS5878470A JP56177415A JP17741581A JPS5878470A JP S5878470 A JPS5878470 A JP S5878470A JP 56177415 A JP56177415 A JP 56177415A JP 17741581 A JP17741581 A JP 17741581A JP S5878470 A JPS5878470 A JP S5878470A
Authority
JP
Japan
Prior art keywords
type semiconductor
semiconductor substrate
wire
terminal
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56177415A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0158672B2 (enExample
Inventor
Mikio Bessho
別所　三樹生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP56177415A priority Critical patent/JPS5878470A/ja
Publication of JPS5878470A publication Critical patent/JPS5878470A/ja
Publication of JPH0158672B2 publication Critical patent/JPH0158672B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure
    • H10W72/5363—
    • H10W72/884—

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP56177415A 1981-11-04 1981-11-04 半導体圧力検出装置 Granted JPS5878470A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56177415A JPS5878470A (ja) 1981-11-04 1981-11-04 半導体圧力検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56177415A JPS5878470A (ja) 1981-11-04 1981-11-04 半導体圧力検出装置

Publications (2)

Publication Number Publication Date
JPS5878470A true JPS5878470A (ja) 1983-05-12
JPH0158672B2 JPH0158672B2 (enExample) 1989-12-13

Family

ID=16030519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56177415A Granted JPS5878470A (ja) 1981-11-04 1981-11-04 半導体圧力検出装置

Country Status (1)

Country Link
JP (1) JPS5878470A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6261374A (ja) * 1985-09-11 1987-03-18 Nec Corp シリコンダイアフラムの形成方法
JPS6381867A (ja) * 1986-09-25 1988-04-12 Yokogawa Electric Corp 半導体拡散ストレンゲ−ジ
JPH02116174A (ja) * 1988-10-25 1990-04-27 Nec Corp 半導体圧力センサ
US5920106A (en) * 1996-12-10 1999-07-06 Denso Corporation Semiconductor device and method for producing the same
JP2000286285A (ja) * 1999-03-30 2000-10-13 Denso Corp 半導体装置の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5342579A (en) * 1976-09-29 1978-04-18 Nippon Denso Co Ltd Pressure-electricity transducer and its production
JPS5696875A (en) * 1979-12-29 1981-08-05 Mitsubishi Electric Corp Semiconductor pressure sensing device and manufacture thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5342579A (en) * 1976-09-29 1978-04-18 Nippon Denso Co Ltd Pressure-electricity transducer and its production
JPS5696875A (en) * 1979-12-29 1981-08-05 Mitsubishi Electric Corp Semiconductor pressure sensing device and manufacture thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6261374A (ja) * 1985-09-11 1987-03-18 Nec Corp シリコンダイアフラムの形成方法
JPS6381867A (ja) * 1986-09-25 1988-04-12 Yokogawa Electric Corp 半導体拡散ストレンゲ−ジ
JPH02116174A (ja) * 1988-10-25 1990-04-27 Nec Corp 半導体圧力センサ
US5920106A (en) * 1996-12-10 1999-07-06 Denso Corporation Semiconductor device and method for producing the same
JP2000286285A (ja) * 1999-03-30 2000-10-13 Denso Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0158672B2 (enExample) 1989-12-13

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