JPS5871648A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS5871648A
JPS5871648A JP56169474A JP16947481A JPS5871648A JP S5871648 A JPS5871648 A JP S5871648A JP 56169474 A JP56169474 A JP 56169474A JP 16947481 A JP16947481 A JP 16947481A JP S5871648 A JPS5871648 A JP S5871648A
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
resistance
film
silicon layer
high resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56169474A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0131704B2 (enrdf_load_stackoverflow
Inventor
Shigeru Koshimaru
越丸　茂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56169474A priority Critical patent/JPS5871648A/ja
Publication of JPS5871648A publication Critical patent/JPS5871648A/ja
Publication of JPH0131704B2 publication Critical patent/JPH0131704B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/40—Resistors
    • H10D1/47—Resistors having no potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00—Three-dimensional [3D] integrated devices

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP56169474A 1981-10-23 1981-10-23 半導体装置 Granted JPS5871648A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56169474A JPS5871648A (ja) 1981-10-23 1981-10-23 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56169474A JPS5871648A (ja) 1981-10-23 1981-10-23 半導体装置

Publications (2)

Publication Number Publication Date
JPS5871648A true JPS5871648A (ja) 1983-04-28
JPH0131704B2 JPH0131704B2 (enrdf_load_stackoverflow) 1989-06-27

Family

ID=15887222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56169474A Granted JPS5871648A (ja) 1981-10-23 1981-10-23 半導体装置

Country Status (1)

Country Link
JP (1) JPS5871648A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0582465A (ja) * 1991-09-24 1993-04-02 Victor Co Of Japan Ltd 半導体装置およびｍｏｓ型ｆｅｔ
JP2002016237A (ja) * 2000-06-27 2002-01-18 Hitachi Ltd 半導体集積回路装置およびその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5529108A (en) * 1978-08-23 1980-03-01 Hitachi Ltd Semiconductor resistance element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5529108A (en) * 1978-08-23 1980-03-01 Hitachi Ltd Semiconductor resistance element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0582465A (ja) * 1991-09-24 1993-04-02 Victor Co Of Japan Ltd 半導体装置およびｍｏｓ型ｆｅｔ
JP2002016237A (ja) * 2000-06-27 2002-01-18 Hitachi Ltd 半導体集積回路装置およびその製造方法

Also Published As

Publication number Publication date
JPH0131704B2 (enrdf_load_stackoverflow) 1989-06-27

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