JPS5867085A - 変位素子 - Google Patents

変位素子

Info

Publication number
JPS5867085A
JPS5867085A JP56166234A JP16623481A JPS5867085A JP S5867085 A JPS5867085 A JP S5867085A JP 56166234 A JP56166234 A JP 56166234A JP 16623481 A JP16623481 A JP 16623481A JP S5867085 A JPS5867085 A JP S5867085A
Authority
JP
Japan
Prior art keywords
displacement
substrates
displacement element
piezoelectric
piezo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56166234A
Other languages
English (en)
Japanese (ja)
Other versions
JPH039633B2 (enrdf_load_stackoverflow
Inventor
Masamitsu Nishida
西田　正光
Shunichiro Kawashima
俊一郎 河島
Ichiro Ueda
一朗 上田
Hiroshi Ouchi
宏 大内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56166234A priority Critical patent/JPS5867085A/ja
Publication of JPS5867085A publication Critical patent/JPS5867085A/ja
Publication of JPH039633B2 publication Critical patent/JPH039633B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP56166234A 1981-10-16 1981-10-16 変位素子 Granted JPS5867085A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56166234A JPS5867085A (ja) 1981-10-16 1981-10-16 変位素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56166234A JPS5867085A (ja) 1981-10-16 1981-10-16 変位素子

Publications (2)

Publication Number Publication Date
JPS5867085A true JPS5867085A (ja) 1983-04-21
JPH039633B2 JPH039633B2 (enrdf_load_stackoverflow) 1991-02-08

Family

ID=15827593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56166234A Granted JPS5867085A (ja) 1981-10-16 1981-10-16 変位素子

Country Status (1)

Country Link
JP (1) JPS5867085A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147694U (enrdf_load_stackoverflow) * 1988-03-31 1989-10-12

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56157649A (en) * 1980-10-15 1981-12-04 Takata Kk Driver protecting device by utilization of air belt

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56157649A (en) * 1980-10-15 1981-12-04 Takata Kk Driver protecting device by utilization of air belt

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147694U (enrdf_load_stackoverflow) * 1988-03-31 1989-10-12

Also Published As

Publication number Publication date
JPH039633B2 (enrdf_load_stackoverflow) 1991-02-08

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