JPS6132836B2 - - Google Patents

Info

Publication number
JPS6132836B2
JPS6132836B2 JP56150287A JP15028781A JPS6132836B2 JP S6132836 B2 JPS6132836 B2 JP S6132836B2 JP 56150287 A JP56150287 A JP 56150287A JP 15028781 A JP15028781 A JP 15028781A JP S6132836 B2 JPS6132836 B2 JP S6132836B2
Authority
JP
Japan
Prior art keywords
piezoelectric substrate
piezoelectric
slit
displacement
displacement element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56150287A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5851578A (ja
Inventor
Masamitsu Nishida
Shunichiro Kawashima
Ichiro Ueda
Hiroshi Oochi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56150287A priority Critical patent/JPS5851578A/ja
Publication of JPS5851578A publication Critical patent/JPS5851578A/ja
Publication of JPS6132836B2 publication Critical patent/JPS6132836B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type

Landscapes

  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP56150287A 1981-09-22 1981-09-22 圧電式変位素子 Granted JPS5851578A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56150287A JPS5851578A (ja) 1981-09-22 1981-09-22 圧電式変位素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56150287A JPS5851578A (ja) 1981-09-22 1981-09-22 圧電式変位素子

Publications (2)

Publication Number Publication Date
JPS5851578A JPS5851578A (ja) 1983-03-26
JPS6132836B2 true JPS6132836B2 (enrdf_load_stackoverflow) 1986-07-29

Family

ID=15493676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56150287A Granted JPS5851578A (ja) 1981-09-22 1981-09-22 圧電式変位素子

Country Status (1)

Country Link
JP (1) JPS5851578A (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60197929A (ja) * 1984-03-22 1985-10-07 Toshiba Corp 磁気記録再生装置のヘツド装置
JPS61148886A (ja) * 1984-12-21 1986-07-07 Japan Storage Battery Co Ltd 圧電体変位装置
JPS61148885A (ja) * 1984-12-21 1986-07-07 Japan Storage Battery Co Ltd 圧電体変位装置
JPH02108353U (enrdf_load_stackoverflow) * 1989-02-15 1990-08-29
JPH0361360U (enrdf_load_stackoverflow) * 1989-10-18 1991-06-17
JP2958263B2 (ja) * 1995-10-19 1999-10-06 株式会社荏原製作所 高温再生器
WO1998007183A2 (en) * 1996-07-25 1998-02-19 Materials Systems Incorporated Serpentine cross section piezoelectric actuator
US6107726A (en) * 1997-07-25 2000-08-22 Materials Systems, Inc. Serpentine cross-section piezoelectric linear actuator
CN1937037A (zh) * 2000-11-28 2007-03-28 新科实业有限公司 带有压电微驱动机构的磁头弹簧片组件

Also Published As

Publication number Publication date
JPS5851578A (ja) 1983-03-26

Similar Documents

Publication Publication Date Title
US6118637A (en) Piezoelectric assembly for micropositioning a disc drive head
US4752712A (en) Piezoelectric laminate stack
US6359370B1 (en) Piezoelectric multiple degree of freedom actuator
US5901031A (en) Variable capacitor
JPH06104503A (ja) バイモルフ型圧電アクチュエータ
JPS6132836B2 (enrdf_load_stackoverflow)
JP2645832B2 (ja) たて効果型モノモルフ素子及びその駆動方法
JPH0455355B2 (enrdf_load_stackoverflow)
JPS5858780A (ja) 電歪素子
JPS61183981A (ja) 圧電体変位装置
JPS5866380A (ja) 電歪基板
JPH039633B2 (enrdf_load_stackoverflow)
JPH03183371A (ja) 積層型圧電アクチュエータ
US4413886A (en) Optical switch
JPH0524749B2 (enrdf_load_stackoverflow)
JPS61148886A (ja) 圧電体変位装置
JPH0443684A (ja) 積層バイモルフ型圧電素子
JP3021460B2 (ja) 静電アクチュエータ
JPH0334383A (ja) 積層セラミックス圧電アクチュエータ
JPH0339388U (enrdf_load_stackoverflow)
JPH0453008Y2 (enrdf_load_stackoverflow)
JPH076716Y2 (ja) 円筒状圧電アクチュエータ
JPS61148885A (ja) 圧電体変位装置
JPH0453009Y2 (enrdf_load_stackoverflow)
JPS6039848Y2 (ja) 光スイツチ