JPS5851578A - 圧電式変位素子 - Google Patents

圧電式変位素子

Info

Publication number
JPS5851578A
JPS5851578A JP56150287A JP15028781A JPS5851578A JP S5851578 A JPS5851578 A JP S5851578A JP 56150287 A JP56150287 A JP 56150287A JP 15028781 A JP15028781 A JP 15028781A JP S5851578 A JPS5851578 A JP S5851578A
Authority
JP
Japan
Prior art keywords
piezoelectric substrate
slit
piezoelectric
displacement
slits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56150287A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6132836B2 (enrdf_load_stackoverflow
Inventor
Masamitsu Nishida
西田　正光
Shunichiro Kawashima
俊一郎 河島
Ichiro Ueda
一朗 上田
Hiroshi Ouchi
宏 大内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56150287A priority Critical patent/JPS5851578A/ja
Publication of JPS5851578A publication Critical patent/JPS5851578A/ja
Publication of JPS6132836B2 publication Critical patent/JPS6132836B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
JP56150287A 1981-09-22 1981-09-22 圧電式変位素子 Granted JPS5851578A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56150287A JPS5851578A (ja) 1981-09-22 1981-09-22 圧電式変位素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56150287A JPS5851578A (ja) 1981-09-22 1981-09-22 圧電式変位素子

Publications (2)

Publication Number Publication Date
JPS5851578A true JPS5851578A (ja) 1983-03-26
JPS6132836B2 JPS6132836B2 (enrdf_load_stackoverflow) 1986-07-29

Family

ID=15493676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56150287A Granted JPS5851578A (ja) 1981-09-22 1981-09-22 圧電式変位素子

Country Status (1)

Country Link
JP (1) JPS5851578A (enrdf_load_stackoverflow)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60197929A (ja) * 1984-03-22 1985-10-07 Toshiba Corp 磁気記録再生装置のヘツド装置
JPS61148885A (ja) * 1984-12-21 1986-07-07 Japan Storage Battery Co Ltd 圧電体変位装置
JPS61148886A (ja) * 1984-12-21 1986-07-07 Japan Storage Battery Co Ltd 圧電体変位装置
JPH02108353U (enrdf_load_stackoverflow) * 1989-02-15 1990-08-29
JPH0361360U (enrdf_load_stackoverflow) * 1989-10-18 1991-06-17
WO1998007183A3 (en) * 1996-07-25 1998-07-02 Materials Systems Inc Serpentine cross section piezoelectric actuator
US5787727A (en) * 1995-10-19 1998-08-04 Ebara Corporation High-temperture generator
WO1999005778A1 (en) * 1997-07-25 1999-02-04 Materials Systems Incorporated Serpentine cross-section piezoelectric linear actuator
US6680826B2 (en) * 2000-11-28 2004-01-20 Sae Magnetics (H.K.) Ltd. Head gimbal assembly with piezoelectric microactuator

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60197929A (ja) * 1984-03-22 1985-10-07 Toshiba Corp 磁気記録再生装置のヘツド装置
JPS61148885A (ja) * 1984-12-21 1986-07-07 Japan Storage Battery Co Ltd 圧電体変位装置
JPS61148886A (ja) * 1984-12-21 1986-07-07 Japan Storage Battery Co Ltd 圧電体変位装置
JPH02108353U (enrdf_load_stackoverflow) * 1989-02-15 1990-08-29
JPH0361360U (enrdf_load_stackoverflow) * 1989-10-18 1991-06-17
US5787727A (en) * 1995-10-19 1998-08-04 Ebara Corporation High-temperture generator
WO1998007183A3 (en) * 1996-07-25 1998-07-02 Materials Systems Inc Serpentine cross section piezoelectric actuator
WO1999005778A1 (en) * 1997-07-25 1999-02-04 Materials Systems Incorporated Serpentine cross-section piezoelectric linear actuator
US6107726A (en) * 1997-07-25 2000-08-22 Materials Systems, Inc. Serpentine cross-section piezoelectric linear actuator
US6680826B2 (en) * 2000-11-28 2004-01-20 Sae Magnetics (H.K.) Ltd. Head gimbal assembly with piezoelectric microactuator

Also Published As

Publication number Publication date
JPS6132836B2 (enrdf_load_stackoverflow) 1986-07-29

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