JPS5851578A - Piezoelectric displacement element - Google Patents
Piezoelectric displacement elementInfo
- Publication number
- JPS5851578A JPS5851578A JP56150287A JP15028781A JPS5851578A JP S5851578 A JPS5851578 A JP S5851578A JP 56150287 A JP56150287 A JP 56150287A JP 15028781 A JP15028781 A JP 15028781A JP S5851578 A JPS5851578 A JP S5851578A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric substrate
- slit
- piezoelectric
- displacement
- slits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type
Landscapes
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は電圧印加によって伸縮変位する圧電式変位素子
の構造に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to the structure of a piezoelectric displacement element that expands and contracts when a voltage is applied.
従来、圧電式変位素子としては圧電基板の一端を固定し
、電界印加による圧電基板の伸縮による他端の変位を用
いるものである。この場合の変位量は、圧電基板の圧電
定数をｄ１圧電基板の変位部の長さをに１印加電界をＥ
としたとき、ｄβＥで表わされる。ｄとＥは圧電基板の
材料により一定の値以下に限定されるので、大きな変位
量を得るに３、。Conventionally, as a piezoelectric displacement element, one end of a piezoelectric substrate is fixed, and the other end is displaced by expansion and contraction of the piezoelectric substrate by applying an electric field. In this case, the amount of displacement is calculated as follows: d1 is the piezoelectric constant of the piezoelectric substrate, 1 is the length of the displaced part of the piezoelectric substrate, and 1 is the applied electric field, E.
When it is, it is expressed as dβE. Since d and E are limited to below a certain value depending on the material of the piezoelectric substrate, 3.
は２を大きくする必要がある。しかしながら、ｌを大き
くすると、変位素子全体の長さが著しく大きくなるので
、比較的小さい形状で大きな変位量を得ることは従来不
可能であった。needs to increase 2. However, increasing l significantly increases the length of the entire displacement element, so it has been impossible to obtain a large amount of displacement with a relatively small shape.
本発明は上記の欠点を除去し、比較的小さな形状で大き
な変位量の得られる圧電式変位素子を提供することを目
的とする。すなわち、本発明は圧電基板に少なくとも一
つ以上の片側が開放されたスリットを設け、スリットを
境界として、電圧印加時のスリットに平行な方向の圧電
基板の変位を逆方向としたことを特徴とする変位素子を
提供するものであり、これにより小形で変位量の大きい
変位素子が得られる。以下に本発明の実施例について説
明する。SUMMARY OF THE INVENTION An object of the present invention is to eliminate the above-mentioned drawbacks and provide a piezoelectric displacement element capable of obtaining a large amount of displacement with a relatively small shape. That is, the present invention is characterized in that a piezoelectric substrate is provided with at least one slit that is open on one side, and with the slit as a boundary, the displacement of the piezoelectric substrate in a direction parallel to the slit when a voltage is applied is made to be in the opposite direction. This provides a displacement element that is small and has a large amount of displacement. Examples of the present invention will be described below.
図は本発明の一実施例を示す圧電式変位素子の構造を示
す。図において、１，３は電極、２は圧電基板、４は支
持台、５．６はスリットである。The figure shows the structure of a piezoelectric displacement element showing one embodiment of the present invention. In the figure, 1 and 3 are electrodes, 2 is a piezoelectric substrate, 4 is a support base, and 5.6 is a slit.
矢印Ｐは分極方向を示す。電極１，３間に直流電圧を印
加すると、圧電基板２のスリット６と側面との間の部分
２ａでは塁の方向に伸び（またけ縮む）スリット５，６
間の部分２ｂでは縮み（まだは伸びる）、スリット６と
側面との間の部分２Ｃは伸びる（縮む）。圧電基板１と
して長さ！＝６０咽９幅４０關、厚さ０．６喘のチタン
酸ジルコン酸鉛系磁器を用いて、幅２陥で長さ４６謹の
スリット５，６を２本図のように設けたのち、圧電基板
にスリットを境界として逆方向に分極処理した。Arrow P indicates the polarization direction. When a DC voltage is applied between the electrodes 1 and 3, the slits 5 and 6 extend (straddle and contract) in the direction of the base in the portion 2a between the slit 6 and the side surface of the piezoelectric substrate 2.
The portion 2b in between shrinks (but still stretches), and the portion 2C between the slit 6 and the side surface stretches (shrinks). Length as piezoelectric substrate 1! Using lead zirconate titanate porcelain with a width of 40 mm and a thickness of 0.6 mm, two slits 5 and 6 with a width of 2 holes and a length of 46 mm were provided as shown in the figure. The piezoelectric substrate was polarized in the opposite direction with the slit as the boundary.
その後、図のように電極（Ａｕ蒸着）１，３を設けたの
ち、素子の一端を支持台に固定した。電極１゜３間に６
００ｖの直流電圧を印加した。その場合のｌ方向の変位
量は２６μｍであった。電界の方向を逆にすることによ
り伸びと縮みが逆になるが、変位量は同じであった。一
方、上記の圧電基板でスリットがない場合では、２方向
の変位量は９μｍであり、スリットをつけた素子に比べ
て変位量は著しく小さかった。Thereafter, electrodes (Au vapor deposited) 1 and 3 were provided as shown in the figure, and one end of the element was fixed to a support. 6 between electrodes 1°3
A DC voltage of 00v was applied. The amount of displacement in the l direction in that case was 26 μm. By reversing the direction of the electric field, the expansion and contraction were reversed, but the amount of displacement remained the same. On the other hand, in the case of the piezoelectric substrate described above without slits, the amount of displacement in two directions was 9 μm, which was significantly smaller than that of the element with slits.
なお、実施例ではスリットを境として分極方向を逆とし
たが、分極方向を同じにし電界の方向を逆にしても（ス
リットを境として分極を分離させる）効果は同じである
。また、分極方向を２に平６ベーー
行な方向とし、その方向に駆動電界を加えてもよい。本
発明でスリットで分離されていない圧電基板の部分は変
位に寄与しないので、その部分は分極処理がされなくて
もよく、電極がなくてもよい。In the example, the polarization direction was reversed with the slit as the boundary, but the effect is the same even if the polarization direction is the same and the direction of the electric field is reversed (polarization is separated with the slit as the boundary). Alternatively, the polarization direction may be set in the 2 to 6 Beh direction, and a driving electric field may be applied in that direction. In the present invention, the portions of the piezoelectric substrate that are not separated by the slits do not contribute to displacement, so those portions do not need to be polarized or have no electrodes.
まだ、実施例ではスリットは２本であるが、１本以上で
あればよい。さらには、圧電基板の材質は実施例に限定
されることなく、印加電界により、ｌ方向に伸縮する種
々の圧電材料を用いることができる。また、圧電基板の
形状も平板にかぎられずに円筒状でもよい。なお、スリ
ットの開放端を交互に逆にすることは変位量を大きくす
る上で重要である。複数のスリットは互いに平行である
方が大きな変位を得る上でもよい。Although the number of slits is two in the embodiment, it may be one or more. Furthermore, the material of the piezoelectric substrate is not limited to the embodiments, and various piezoelectric materials that expand and contract in the l direction by an applied electric field can be used. Further, the shape of the piezoelectric substrate is not limited to a flat plate, but may be cylindrical. Note that it is important to alternately reverse the open ends of the slits in order to increase the amount of displacement. It is better for the plurality of slits to be parallel to each other in order to obtain a larger displacement.
以上のように本発明の圧電式変位素子では比較的小さな
形状で大きな変位量を得ることができるため、ビデオテ
ープレコードのオートトラッキング用ヘッド駆動素子等
に用いることができる。本発明の圧電式変位素子は変位
が直線的であるとともに、スリットの数を増すことによ
り、同じ圧電基板の長さで、変位量を著しく大きくする
ことが８、、。As described above, the piezoelectric displacement element of the present invention can obtain a large amount of displacement with a relatively small shape, and therefore can be used as an auto-tracking head drive element for video tape records. In the piezoelectric displacement element of the present invention, the displacement is linear, and by increasing the number of slits, the amount of displacement can be significantly increased with the same length of the piezoelectric substrate8.
できるため応用範囲が広い。Because it can be used, it has a wide range of applications.
図は本発明の一実施例の圧電式変位素子の構造を示す斜
視図である。
１．３・・・・電極、２・−・・・圧電基板、４・・・
・支持台、６，６・ ・スリット。The figure is a perspective view showing the structure of a piezoelectric displacement element according to an embodiment of the present invention. 1.3... Electrode, 2... Piezoelectric substrate, 4...
・Support stand, 6, 6・ ・Slit.
Claims (1)
たスリットを設け、前記スリットを境界として、電圧印
加時の前記スリットに平行な方向の圧電基板の変位を逆
方向としたことを特徴とする圧電式翰）圧電基板は互い
に平行な複数個のスリットを有し、前記スリットの開放
端が交互に逆向きであることを特徴とする特許請求の範
囲第１項記載の圧電式変位素子。 ｂ） 圧電基板において、スリットを境界として分極
処理の方向を互いに逆にしたことを特徴とする特許請求
の範囲第１項記載の圧電式変位素子。 （４）圧電基板において、少なくとも前記圧電基板の側
面と隣接するスリットで囲まれた部分と相隣接するスリ
′ノドで囲まれた部分が分極処理されていることを特徴
とする特許請求の範囲第１項、第２、− ２項または第３項記載の圧電式変位素子。 （５）圧電基板において、少なくとも前記圧電基板の側
面と隣接するスリットで囲まれた部分と相隣接するスリ
ットで囲まれた部分に電極を設けたことを特徴とする特
許請求の範囲第１項、第２項。 または第３項に記載の圧電式変位素子。 （６）スリットで分割された圧電基板の開放端の少なく
とも一つが固定されていることを特徴とする特許請求の
範囲第１項、第２項、または第３項に記載の圧電式変位
素子。[Claims] (1) A piezoelectric substrate is provided with at least one slit that is open on one side, and with the slit as a boundary, displacement of the piezoelectric substrate in a direction parallel to the slit when a voltage is applied is controlled in the opposite direction. 1. A piezoelectric substrate according to claim 1, characterized in that the piezoelectric substrate has a plurality of slits parallel to each other, and the open ends of the slits are alternately oriented in opposite directions. piezoelectric displacement element. b) The piezoelectric displacement element according to claim 1, wherein the piezoelectric substrate is polarized in opposite directions with the slit as a boundary. (4) In the piezoelectric substrate, at least a portion surrounded by a slit adjacent to a side surface of the piezoelectric substrate and a portion surrounded by a slit adjacent to the side surface of the piezoelectric substrate are polarized. The piezoelectric displacement element according to item 1, item 2, - item 2, or item 3. (5) In the piezoelectric substrate, electrodes are provided at least in a portion surrounded by a slit adjacent to a side surface of the piezoelectric substrate and a portion surrounded by a slit adjacent to the side surface of the piezoelectric substrate, Section 2. Or the piezoelectric displacement element according to item 3. (6) The piezoelectric displacement element according to claim 1, 2, or 3, wherein at least one of the open ends of the piezoelectric substrate divided by slits is fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56150287A JPS5851578A (en) | 1981-09-22 | 1981-09-22 | Piezoelectric displacement element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56150287A JPS5851578A (en) | 1981-09-22 | 1981-09-22 | Piezoelectric displacement element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5851578A true JPS5851578A (en) | 1983-03-26 |
| JPS6132836B2 JPS6132836B2 (en) | 1986-07-29 |
Family
ID=15493676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56150287A Granted JPS5851578A (en) | 1981-09-22 | 1981-09-22 | Piezoelectric displacement element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5851578A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60197929A (en) * | 1984-03-22 | 1985-10-07 | Toshiba Corp | Head device of magnetic recording and reproducing device |
| JPS61148885A (en) * | 1984-12-21 | 1986-07-07 | Japan Storage Battery Co Ltd | Piezoelectric displacement device |
| JPS61148886A (en) * | 1984-12-21 | 1986-07-07 | Japan Storage Battery Co Ltd | Piezoelectric displacement device |
| JPH02108353U (en) * | 1989-02-15 | 1990-08-29 | ||
| JPH0361360U (en) * | 1989-10-18 | 1991-06-17 | ||
| WO1998007183A2 (en) * | 1996-07-25 | 1998-02-19 | Materials Systems Incorporated | Serpentine cross section piezoelectric actuator |
| US5787727A (en) * | 1995-10-19 | 1998-08-04 | Ebara Corporation | High-temperture generator |
| WO1999005778A1 (en) * | 1997-07-25 | 1999-02-04 | Materials Systems Incorporated | Serpentine cross-section piezoelectric linear actuator |
| US6680826B2 (en) * | 2000-11-28 | 2004-01-20 | Sae Magnetics (H.K.) Ltd. | Head gimbal assembly with piezoelectric microactuator |
-
1981
- 1981-09-22 JP JP56150287A patent/JPS5851578A/en active Granted
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60197929A (en) * | 1984-03-22 | 1985-10-07 | Toshiba Corp | Head device of magnetic recording and reproducing device |
| JPH0456367B2 (en) * | 1984-03-22 | 1992-09-08 | Toshiba Kk | |
| JPS61148885A (en) * | 1984-12-21 | 1986-07-07 | Japan Storage Battery Co Ltd | Piezoelectric displacement device |
| JPS61148886A (en) * | 1984-12-21 | 1986-07-07 | Japan Storage Battery Co Ltd | Piezoelectric displacement device |
| JPH02108353U (en) * | 1989-02-15 | 1990-08-29 | ||
| JPH0361360U (en) * | 1989-10-18 | 1991-06-17 | ||
| US5787727A (en) * | 1995-10-19 | 1998-08-04 | Ebara Corporation | High-temperture generator |
| WO1998007183A2 (en) * | 1996-07-25 | 1998-02-19 | Materials Systems Incorporated | Serpentine cross section piezoelectric actuator |
| WO1998007183A3 (en) * | 1996-07-25 | 1998-07-02 | Materials Systems Inc | Serpentine cross section piezoelectric actuator |
| WO1999005778A1 (en) * | 1997-07-25 | 1999-02-04 | Materials Systems Incorporated | Serpentine cross-section piezoelectric linear actuator |
| US6107726A (en) * | 1997-07-25 | 2000-08-22 | Materials Systems, Inc. | Serpentine cross-section piezoelectric linear actuator |
| US6680826B2 (en) * | 2000-11-28 | 2004-01-20 | Sae Magnetics (H.K.) Ltd. | Head gimbal assembly with piezoelectric microactuator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6132836B2 (en) | 1986-07-29 |
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