JPH039633B2 - - Google Patents
Info
- Publication number
- JPH039633B2 JPH039633B2 JP56166234A JP16623481A JPH039633B2 JP H039633 B2 JPH039633 B2 JP H039633B2 JP 56166234 A JP56166234 A JP 56166234A JP 16623481 A JP16623481 A JP 16623481A JP H039633 B2 JPH039633 B2 JP H039633B2
- Authority
- JP
- Japan
- Prior art keywords
- substrates
- displacement
- piezoelectric
- electrostrictive
- length direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 52
- 238000006073 displacement reaction Methods 0.000 claims description 40
- 229910052573 porcelain Inorganic materials 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000008602 contraction Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】
本発明は電圧印加によつて長さ方向に変位する
電位素子に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a potential element that is longitudinally displaced by the application of a voltage.
従来、圧電型変位素子としては圧電基板の一端
を支持台に固定し、電界印加による圧電基板の伸
縮による他端の変位を用いるものである。この場
合変位量は、圧電基板の圧電定数をｄ、変位部の
長さをｌ、印加電界をＥとしたとき、dlEで表わ
される。ｄとＥは圧電基板の材料によつてある値
以下に限定されるので、大きな変位量を得るには
ｌを大きくする必要がある。しかしながら、ｌを
大きくすると、変位素子全体の長さが著しく大き
くなるので、比較的小さい形状で大きな変位量を
得ることは従来不可能であつた。 Conventionally, as a piezoelectric displacement element, one end of a piezoelectric substrate is fixed to a support base, and the other end is displaced by expansion and contraction of the piezoelectric substrate by applying an electric field. In this case, the amount of displacement is expressed as dlE, where d is the piezoelectric constant of the piezoelectric substrate, l is the length of the displacement part, and E is the applied electric field. Since d and E are limited to below a certain value depending on the material of the piezoelectric substrate, it is necessary to increase l in order to obtain a large amount of displacement. However, if l is increased, the length of the entire displacement element becomes significantly longer, so it has conventionally been impossible to obtain a large amount of displacement with a relatively small shape.
本発明は上記の欠点を除去し、比較的小さな形
状で大きな変位量の得られる変位素子を提供す
る。すなわち、本発明は、長さ方向に変位する複
数個の圧電基板を長さ方向に平行で並列に配置
し、かつ隣接する圧電基板を長さ方向の一端で固
定し、更に電圧印加時の隣接する圧電基板の長さ
方向の変位を逆方向としたことを特徴とする変位
素子、ならびに、長さ方向に変位する少なくとも
３枚以上の電歪基板を長さ方向と平行で並列に配
置し、かつ隣接する電歪基板を長さ方向の交互に
逆の一端で固定し、さらに並列に配置した電歪基
板のうち一つおきの電歪基板が電圧印加により変
位するようにしたことを特徴とする変位素子を提
供する。以下に本発明を実施例により説明する。 The present invention eliminates the above-mentioned drawbacks and provides a displacement element capable of obtaining a large amount of displacement with a relatively small shape. That is, in the present invention, a plurality of piezoelectric substrates that are displaced in the length direction are arranged in parallel in parallel in the length direction, and adjacent piezoelectric substrates are fixed at one end in the length direction, and further, when a voltage is applied, the adjacent piezoelectric substrates are A displacement element characterized in that displacements in the longitudinal direction of piezoelectric substrates are opposite in direction, and at least three or more electrostrictive substrates displacing in the longitudinal direction are arranged in parallel parallel to the longitudinal direction, Adjacent electrostrictive substrates are fixed at opposite ends alternately in the length direction, and further, every other electrostrictive substrate among the electrostrictive substrates arranged in parallel is displaced by application of a voltage. A displacement element is provided. The present invention will be explained below using examples.
実施例 １
第１図は本発明の実施例を示す変位素子の構成
図である。長さ50mm、幅５mm、厚さ0.5mmの形状
のチタン酸ジルコン酸鉛系磁器よりなる圧電基板
１ａ，１ｂ，１ｃ（電極はCr−Au蒸着電極で分極
は厚み方向）３枚を図に示すように平行に配置し
たのち、隣接する圧電基板１ａ，１ｂ、同１ｂ，
１ｃをその端部で長さ５mmにエポキシ樹脂系接着
剤２ａ，２ｂでそれぞれ固定した。なお、その固
定は図に示すように互いに逆の一端で固定した。
また、固定部分の電極は接着前に除去した。その
後、自由端の一つを図のように支持台４に接着剤
で固定し、変位量を測定する際の基準とした。こ
のようにして作製した変位素子７の３対の電極５
ａ，５ｂ、同５ｃ，５ｄ、同５ｅ，５ｆ間に
500Vの直流電圧を隣接する３枚の圧電基板１ａ，
１ｂ，１ｃが交互に逆向きの変位をする方向に、
すなわち圧電基板１ａ，１ｃが伸びるとき圧電基
板１ｂが縮み、圧電基板１ａ，１ｃが縮むとき圧
電基板１ｂが伸びる方向に印加した。その結果、
変位素子７における自由端６の変位量は長さ方向
に±28μｍであつた。一方、上記の変位素子にお
ける圧電基板１枚だけで構成した従来の変位素子
では、電圧印加時の長さ方向の変位量は±9μｍ
であり、本発明の構成のものに比べて著しく小さ
かつた。すなわち、本発明の変位素子では、従来
の変位素子に比べて、変位素子の長さが同じ状態
で、約３倍の変位量が得られた。また、圧電基板
の数量をさらに増し、かつ基板間の固定を交互に
逆の端部ですることにより、変位量をより大きく
することができる。その変位量は圧電基板に印加
する電圧の増加に比例して、ほぼ直線的に大きく
なる。印加電圧が交流であれば、その周波数の伸
縮が得られる。なお、実施例１で圧電基板１ｂに
電圧を印加しない場合は変位量が小さくなるが、
それでも従来のものよりは大きい。Embodiment 1 FIG. 1 is a configuration diagram of a displacement element showing an embodiment of the present invention. The figure shows three piezoelectric substrates 1a, 1b, and 1c (electrodes are Cr-Au evaporated electrodes and polarization is in the thickness direction) made of lead zirconate titanate ceramics and are 50 mm long, 5 mm wide, and 0.5 mm thick. After arranging them in parallel, the adjacent piezoelectric substrates 1a, 1b, 1b,
1c was fixed at its ends to a length of 5 mm with epoxy resin adhesives 2a and 2b, respectively. In addition, the fixing was done at one end opposite to each other as shown in the figure.
In addition, the fixed electrode was removed before bonding. Thereafter, one of the free ends was fixed to the support base 4 with an adhesive as shown in the figure, and was used as a reference when measuring the amount of displacement. Three pairs of electrodes 5 of the displacement element 7 manufactured in this way
Between a, 5b, 5c, 5d, 5e, 5f
A DC voltage of 500V is applied to three adjacent piezoelectric substrates 1a,
In the direction in which 1b and 1c are alternately displaced in opposite directions,
That is, the voltage was applied in the direction in which the piezoelectric substrate 1b contracts when the piezoelectric substrates 1a and 1c extend, and the piezoelectric substrate 1b extends when the piezoelectric substrates 1a and 1c contract. the result,
The amount of displacement of the free end 6 of the displacement element 7 was ±28 μm in the length direction. On the other hand, in the conventional displacement element described above, which is composed of only one piezoelectric substrate, the amount of displacement in the longitudinal direction when voltage is applied is ±9 μm.
, which was significantly smaller than that of the structure of the present invention. That is, with the displacement element of the present invention, about three times as much displacement as the conventional displacement element was obtained with the same length of the displacement element. Furthermore, by further increasing the number of piezoelectric substrates and fixing the substrates alternately at opposite ends, the amount of displacement can be increased. The amount of displacement increases almost linearly in proportion to an increase in the voltage applied to the piezoelectric substrate. If the applied voltage is alternating current, the frequency can be expanded or contracted. Note that in Example 1, when no voltage is applied to the piezoelectric substrate 1b, the amount of displacement becomes small;
However, it is still larger than the conventional one.
なお、実施例では圧電基板として圧電磁器を用
いたが、その他の圧電材料をたとえば圧電単結
晶、有機圧電材料でもよいことはもちろんであ
る。また、圧電基板として圧電板を複数枚貼り合
わせたものでもよい。実施例では厚み方向に分極
処理した圧電基板を用いたが、分極が長さ方向で
長さ方向に電界を印加して用いてもよい。 In the embodiment, piezoelectric ceramic was used as the piezoelectric substrate, but it goes without saying that other piezoelectric materials, such as piezoelectric single crystals or organic piezoelectric materials, may be used. Alternatively, the piezoelectric substrate may be one in which a plurality of piezoelectric plates are bonded together. In the embodiment, a piezoelectric substrate polarized in the thickness direction was used, but the piezoelectric substrate may be polarized in the length direction and an electric field applied in the length direction.
実施例 ２
第２図は本発明の変位素子の他の実施例を示す
ものである。３枚の（Pb0.9Ba0.1）（Mg1/3Nb2/3）0.
６９Ti0.31O3なる一般式で示される組成をもつ電歪
磁器板８ａ，８ｂ，８ｃ（長さ50mm、幅10mm、厚
さ0.5mm）の両面の中央部にそれぞれ長さ40mmの
電極９ａ，９ｂ、同９ｃ，９ｄ、同９ｅ，９ｆ
（Cr−Au蒸着）をつけたのち、第２図のように電
歪磁器板８ａ，８ｂ，８ｃを配置し、隣接する基
板８ａ，８ｂ、同８ｂ，８ｃの端部５mmをエポキ
シ樹脂板１０ａ，１０ｂ（５×10×２mm3）を介し
て接着剤でそれぞれ固定した。固定は図に示すよ
うに逆の一端で行なつた。その後、自由端の一つ
を支持台１１に幅５mmで接着剤を用いて固定し
た。このようにして作成した変位素子１２の電歪
磁器板８ａ，８ｃの電極９ａ，９ｂ、同９ｅ，９
ｆ間に1kVの直流電圧を印加した。その結果、電
位素子１２の自由端１２ａは支持台の方に38μｍ
移動した。その後、電歪磁器板８ｂの電極９ｃ，
９ｄ間に1kVの直流電圧を印加した場合には（電
歪磁器板８ａ，８ｃには電界を印加しない）、自
由端１２ａが支持台１１とは逆方向に20μｍ移動
した。したがつて、自由端１２ａの移動距離は全
体で58μｍであり、大きな変位量が得られた。さ
らに電歪磁器板の数量を増すことにより、電位量
をより大きくすることができる。また、印加電圧
は交流でもよい。なお、この実施例では電歪基板
として室温付近で大きな電歪効果（２次の効果）
が得られる（Pb0.9Ba0.1）（Mg1/3Nb2/3）0.69Ti0.31
O3磁器を用いたが、（Ba、Sr）TiO系磁器、Pb
（Mg1/3Nb2/3）O3−Pb（Fe1/2Nb1/2）O3系磁器な
どの他の電歪効果の大きい材料を用いることもで
きる。これらの材料によつて得られる変位は２次
の効果であるので、電界の２乗に比例し、印加電
圧の正負にはよらない。Embodiment 2 FIG. 2 shows another embodiment of the displacement element of the present invention. Three (Pb 0.9 Ba 0.1 ) (Mg 1/3 Nb 2/3 ) 0.
69 Electrostrictive porcelain plates 8a, 8b, 8c (length 50 mm, width 10 mm, thickness 0.5 mm) having a composition represented by the general formula 69 Ti 0.31 O 3 have electrodes 9 a, each having a length of 40 mm, in the center of both sides. 9b, 9c, 9d, 9e, 9f
(Cr-Au evaporation), the electrostrictive porcelain plates 8a, 8b, 8c are arranged as shown in Fig. 2, and the edges 5 mm of the adjacent substrates 8a, 8b, 8b, 8c are attached to the epoxy resin plate 10a. , 10b (5×10×2 mm 3 ) with adhesive. Fixation was performed at one opposite end as shown in the figure. Thereafter, one of the free ends was fixed to the support stand 11 with a width of 5 mm using an adhesive. The electrodes 9a, 9b, 9e, 9 of the electrostrictive porcelain plates 8a, 8c of the displacement element 12 thus created
A DC voltage of 1 kV was applied between f. As a result, the free end 12a of the potential element 12 is 38 μm toward the support base.
moved. After that, the electrode 9c of the electrostrictive ceramic plate 8b,
When a DC voltage of 1 kV was applied between 9d (no electric field was applied to the electrostrictive ceramic plates 8a and 8c), the free end 12a moved 20 μm in the opposite direction to the support base 11. Therefore, the total movement distance of the free end 12a was 58 μm, and a large amount of displacement was obtained. Furthermore, by increasing the number of electrostrictive ceramic plates, the amount of potential can be further increased. Further, the applied voltage may be alternating current. Note that in this example, the electrostrictive substrate has a large electrostrictive effect (second-order effect) near room temperature.
(Pb 0.9 Ba 0.1 ) (Mg 1/3 Nb 2/3 ) 0.69 Ti 0.31
Although O 3 porcelain was used, (Ba, Sr) TiO porcelain, Pb
Other materials with a large electrostrictive effect, such as (Mg 1/3 Nb 2/3 ) O 3 −Pb (Fe 1/2 Nb 1/2 ) O 3 ceramic, can also be used. Since the displacement obtained by these materials is a second-order effect, it is proportional to the square of the electric field and does not depend on the sign of the applied voltage.
なお、本発明で圧電基板あるいは電歪基板の固
定部分は変位に寄与しないので、その部分には電
極がなくてよい。また、圧電基板の場合にはこの
部分の分極処理は不必要である。本発明で、圧電
基板あるいは電歪基板は実施例の矩形板に限られ
ず、円筒状などでもよい。基板の幅も長さより大
きくてもよい。複数の圧電基板あるいは電歪基板
の固定は基板２枚を実施例１のように接着剤で直
接行なつてもよいし、実施例２のように樹脂板あ
るいは金属板、磁器板などを介して行なつてもよ
く、さらには金属などのバンドで締めつけたり、
ボルト締めなどでもよい。 Note that in the present invention, since the fixed portion of the piezoelectric substrate or the electrostrictive substrate does not contribute to displacement, there may be no electrode in that portion. Further, in the case of a piezoelectric substrate, polarization treatment of this portion is unnecessary. In the present invention, the piezoelectric substrate or electrostrictive substrate is not limited to the rectangular plate of the embodiment, but may be cylindrical or the like. The width of the substrate may also be greater than the length. A plurality of piezoelectric substrates or electrostrictive substrates may be fixed by directly attaching two substrates with adhesive as in Example 1, or by using a resin plate, metal plate, porcelain plate, etc. as in Example 2. You can also tighten it with a metal band,
It may also be bolted.
以上のように、本発明の電位素子では比較的小
さな形状で大きな変位量を得ることができるた
め、VTRのオートトラツキング用ヘツド駆動素
子などに用いることができる。また、本発明の変
位素子は変位が直線的であるとともに、基板の数
を増すと、同程度の変位素子の大きさで著しく変
位量を大きくできるため応用範囲が広い。 As described above, the potential element of the present invention can obtain a large amount of displacement with a relatively small shape, and therefore can be used as an auto-tracking head drive element of a VTR. Further, the displacement element of the present invention has a linear displacement, and when the number of substrates is increased, the amount of displacement can be significantly increased with the same size of displacement element, so it has a wide range of applications.
第１図と第２図はそれぞれ本発明の実施例の変
位素子の斜視図である。
１ａ，１ｂ，１ｃ……圧電体、２ａ，２ｂ，１
０ａ，１０ｂ……エポキシ樹脂、４，１１……支
持台、５ａ〜５ｆ，９ａ〜９ｆ……電極、７，１
２……変位素子、８ａ，８ｂ，８ｃ……電歪磁器
板。
1 and 2 are perspective views of displacement elements according to embodiments of the present invention, respectively. 1a, 1b, 1c...piezoelectric body, 2a, 2b, 1
0a, 10b... Epoxy resin, 4, 11... Support stand, 5a to 5f, 9a to 9f... Electrode, 7, 1
2... Displacement element, 8a, 8b, 8c... Electrostrictive porcelain plate.
Claims (1)
方向と平行で並列に配置し、かつこれらの圧電基
板のうち隣接する圧電基板同士を長さ方向の一端
で固定し、さらに電圧印加時の隣接する圧電基板
の変位を逆方向としたことを特徴とする変位素
子。 ２ 圧電基板が少なくとも３枚であつて、これら
の圧電基板のうち隣接する圧電基板同士の固定が
交互に逆の一端でなされたことを特徴とする特許
請求の範囲第１項に記載の電位素子。 ３ 長さ方向に変位する少なくとも３枚以上の電
歪基板を長さ方向と平行で並列に配置し、かつこ
れら電歪基板のうち隣接する電歪基板同士を長さ
方向の交互に逆の一端で固定し、さらに並列に配
置した電歪基板のうち一つおきの電歪基板が電圧
印加により変位するようにしたことを特徴とする
変位素子。[Claims] 1. A plurality of piezoelectric substrates that are displaceable in the length direction are arranged in parallel and parallel to the length direction, and adjacent piezoelectric substrates among these piezoelectric substrates are fixed at one end in the length direction. A displacement element further characterized in that the displacement of adjacent piezoelectric substrates when a voltage is applied is in opposite directions. 2. The potential element according to claim 1, characterized in that there are at least three piezoelectric substrates, and among these piezoelectric substrates, adjacent piezoelectric substrates are fixed alternately at opposite ends. . 3 At least three or more electrostrictive substrates that are displaceable in the length direction are arranged parallel to each other in parallel with the length direction, and adjacent electrostrictive substrates among these electrostrictive substrates are arranged at alternately opposite ends in the length direction. A displacement element characterized in that every other electrostrictive substrate among the electrostrictive substrates arranged in parallel is displaced by application of a voltage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56166234A JPS5867085A (en) | 1981-10-16 | 1981-10-16 | Displacement element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56166234A JPS5867085A (en) | 1981-10-16 | 1981-10-16 | Displacement element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5867085A JPS5867085A (en) | 1983-04-21 |
| JPH039633B2 true JPH039633B2 (en) | 1991-02-08 |
Family
ID=15827593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56166234A Granted JPS5867085A (en) | 1981-10-16 | 1981-10-16 | Displacement element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5867085A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0721115Y2 (en) * | 1988-03-31 | 1995-05-15 | 本多電子株式会社 | Ultrasonic drive |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56157649A (en) * | 1980-10-15 | 1981-12-04 | Takata Kk | Driver protecting device by utilization of air belt |
-
1981
- 1981-10-16 JP JP56166234A patent/JPS5867085A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56157649A (en) * | 1980-10-15 | 1981-12-04 | Takata Kk | Driver protecting device by utilization of air belt |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5867085A (en) | 1983-04-21 |
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