JPS5858780A - Electrostrictive element - Google Patents
Electrostrictive elementInfo
- Publication number
- JPS5858780A JPS5858780A JP56157649A JP15764981A JPS5858780A JP S5858780 A JPS5858780 A JP S5858780A JP 56157649 A JP56157649 A JP 56157649A JP 15764981 A JP15764981 A JP 15764981A JP S5858780 A JPS5858780 A JP S5858780A
- Authority
- JP
- Japan
- Prior art keywords
- electrostrictive
- substrates
- substrate
- displacement
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 46
- 238000006073 displacement reaction Methods 0.000 claims abstract description 32
- 239000003822 epoxy resin Substances 0.000 abstract description 7
- 229920000647 polyepoxide Polymers 0.000 abstract description 7
- 239000000853 adhesive Substances 0.000 abstract description 2
- 230000001070 adhesive effect Effects 0.000 abstract description 2
- 239000000919 ceramic Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 5
- 239000002184 metal Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052573 porcelain Inorganic materials 0.000 description 3
- 230000003014 reinforcing effect Effects 0.000 description 3
- 230000010287 polarization Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000009291 secondary effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は電圧印加によってたわみ変位する電歪素子に関
するものである。。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electrostrictive element that is deflected and displaced by voltage application. .
従来、たわみ変位する電歪素子としては、圧電体板２枚
を重ねて直接あるいは補強板を介して接着し、電圧印加
により１枚は伸び他方は縮むようにして゛たわみ変位を
生じるようにしたもの、金属板の片側に圧電体板を貼り
付けた構造のものなどがあり、広く用いられている。こ
れらの変位素子で大きなたわみ変色を得るには圧電体板
の長さを大きくする必要がある。しかし、圧電体板を長
くすると変位素子の形状が大きくなるため、今まで小形
の素子で大きなたわみ変位を得ることは不可能であった
。また、たわみ変位する電歪基板に片側が開放されたス
リットを設け、そのスリットを、境としてたわみ変位を
逆方向にすることにより比較的小さな形状で大きなたわ
み変位を得る方法が特開昭５６−６６６８５号公報に記
載されているが、この方法には大きな電歪基板を必要と
すること、量産化しがたいことなど解決すべき問題が残
されている。Conventionally, electrostrictive elements that undergo deflection displacement are made by stacking two piezoelectric plates and bonding them directly or through a reinforcing plate, and applying a voltage causes one to expand and the other to contract, thereby producing a deflection displacement. There are also types that have a structure in which a piezoelectric plate is attached to one side of a metal plate, and these are widely used. In order to obtain a large deflection color change with these displacement elements, it is necessary to increase the length of the piezoelectric body plate. However, as the length of the piezoelectric plate increases, the shape of the displacement element becomes larger, so until now it has been impossible to obtain a large deflection displacement with a small element. In addition, a method of obtaining a large deflection displacement with a relatively small shape by providing a slit with one side open in an electrostrictive substrate that deflects and making the deflection in the opposite direction using the slit as a boundary is disclosed in JP-A-56- Although this method is described in Japanese Patent No. 66685, there are still problems to be solved, such as the need for a large electrostrictive substrate and the difficulty in mass production.
本発明は上記の従来の欠点を除去し、小形で、大きなた
わみ変位が得られ、かつ量産化の容易な電歪素子を提供
する。すなわち、本発明はたわみ変位する複数個の電歪
基板を互いに平行に配置し、さらに隣接する電歪基板の
電圧印加時のたゎみ変位を逆方向としたことを特徴とす
る電歪素子を提供する。The present invention eliminates the above-mentioned conventional drawbacks, and provides an electrostrictive element that is small, can obtain a large deflection displacement, and can be easily mass-produced. That is, the present invention provides an electrostrictive element characterized in that a plurality of electrostrictive substrates which are deflected are arranged parallel to each other, and further, the deflection of adjacent electrostrictive substrates when a voltage is applied is in opposite directions. provide.
以下に本発明を実施例により説明する。The present invention will be explained below using examples.
実施例１
第１図は本発明の電歪素子の構成造を示す斜視図であり
、２ａ、２ｂ、２ｃ、２ｄ、２ｅ、２ｆ。Example 1 FIG. 1 is a perspective view showing the structure of an electrostrictive element of the present invention, and 2a, 2b, 2c, 2d, 2e, and 2f.
２ｑ 、２ｈはＣｒ−Ａｕの蒸着電極、１ａ、１ｂ。2q, 2h are Cr-Au vapor deposition electrodes, 1a, 1b.
１Ｃ２１ｄはジルコン酸チタン酸鉛系磁器よりなる圧電
磁器板（分極処理は厚みｂ向ですべて上向きで、形状は
長さ２０ｍ１９幅６聴、厚さ０．５聴）である。電極２
ａ、２ｂをつけた圧電磁器板１ａと電極２ｃ、２ｄをつ
けた圧電磁器板１ｂとをエポキシ樹脂で接着し、同様に
電極２ｅ、２ｆをっけた圧電磁器板１ｃと電極２ｇ、２
ｈをっけた圧電磁器板１ｄとをエポキシ樹脂で接着した
。このようにして作製した貼り合せ電歪基板６，７をそ
の端部でエポキシ樹脂板３（寸法５ ｍｍ Ｘ ３ ｒ
ｒｒｍ Ｘ １聴）を介してエポキシ樹脂で固定した。1C21d is a piezoelectric ceramic plate made of lead zirconate titanate porcelain (the polarization treatment is in the thickness b direction, all facing upward, and the shape is 20 m long, 19 mm wide, 6 mm thick, and 0.5 mm thick). Electrode 2
A piezoelectric ceramic plate 1a with electrodes 2c and 2b attached thereto and a piezoelectric ceramic plate 1b with electrodes 2c and 2d attached are bonded with epoxy resin, and a piezoelectric ceramic plate 1c with electrodes 2e and 2f attached thereon and a piezoelectric ceramic plate 1b with electrodes 2g and 2 similarly attached.
The piezoelectric ceramic plate 1d marked with h was bonded with epoxy resin. The end portions of the bonded electrostrictive substrates 6 and 7 produced in this manner were attached to an epoxy resin plate 3 (dimensions: 5 mm x 3 r
rrm
さらに第１図に示したように、電歪基板７の一端を支持
台４に３陶の長さに接着剤で固楚した。なお、電歪基板
の固定部分の電極は除去した。その後、４対の電極間に
、電歪基板６では上に凹のたわみ変位。Furthermore, as shown in FIG. 1, one end of the electrostrictive substrate 7 was fixed to the support stand 4 to a length of 3 mm with an adhesive. Note that the electrodes on the fixed portion of the electrostrictive substrate were removed. Thereafter, the electrostrictive substrate 6 undergoes an upward concave deflection displacement between the four pairs of electrodes.
電歪基板７では下に凹のたわみ変位を生じるように電歪
基板６と同７では逆方向の直流１圧を印加した。その後
、変位量を非接散変位計で測定した。One direct current pressure in the opposite direction was applied to the electrostrictive substrates 6 and 7 so as to produce a downward concave deflection displacement in the electrostrictive substrate 7. Thereafter, the amount of displacement was measured using a non-concentration displacement meter.
その結果印加電圧が６００Ｖである場合の電歪基板６に
おける自由端のたわみ変位は１６２Ｉｘｒ１であった。As a result, the deflection displacement of the free end of the electrostrictive substrate 6 when the applied voltage was 600V was 162Ixr1.
一方、電歪基板６だけの場合のたわみ変位は９２μｍで
あった。すなわち、本発明の電歪素子では、電歪基板が
１枚の従来例に比べて、素子の長さを変えずにたわみの
変位量が７６係増加した。On the other hand, the deflection displacement in the case of only the electrostrictive substrate 6 was 92 μm. That is, in the electrostrictive element of the present invention, the deflection displacement amount increased by a factor of 76 without changing the length of the element, compared to the conventional example having one electrostrictive substrate.
実施例２
第２図は３枚の電歪基板８，９．１０からなる電歪素子
の構成を示す斜視図であり、各々の電歪基板は実施例１
の電歪基板６または同７と同じ犬−！、、６
きさある。３枚の電歪基板１ｉ３，９．１０を図に示し
たように、エポキシ樹脂１３ａ 、 １３ｂで長さ４咽
だけ、互いに逆方向の一端で固定した。また、電歪基板
１ｏの自由端を、変位の基準にするため、支持台１４に
固定した。その後、隣接する電歪基板のたわみ変位が逆
方向になるように圧電磁器板１１ａ、１１ｂ、１１Ｃ９
１１ｄ、１１ｅ、１１ｆに設けた６対の電極１２ａ 、
１２ｂ間、同１２ｃ 、 １２ｄ間、同１２ｅ。Example 2 FIG. 2 is a perspective view showing the structure of an electrostrictive element consisting of three electrostrictive substrates 8, 9, and 10, each of which is the same as that of Example 1.
The same dog as electrostrictive board 6 or 7! ,,6 It's scary. As shown in the figure, three electrostrictive substrates 1i3, 9.10 were fixed with epoxy resins 13a, 13b by four lengths at one end in opposite directions. Further, the free end of the electrostrictive substrate 1o was fixed to a support base 14 in order to use it as a reference for displacement. Thereafter, piezoelectric ceramic plates 11a, 11b, 11C9 are arranged so that the deflection displacements of adjacent electrostrictive substrates are in opposite directions.
6 pairs of electrodes 12a provided at 11d, 11e, 11f,
Between 12b, 12c, 12d, 12e.
１２ｆ間、同１２ｇ、１２濶、同１２ｔ 、 １２７間
、同１２ｋ。12f, 12g, 12b, 12t, 127, 12k.
１２１間にそれぞれ５００Ｖの直流電圧を印加した。A DC voltage of 500 V was applied between each of 121 and 121.
その結果、電歪基板８の開放端の位置は電圧印加前に比
べて電歪基板の長さに垂直な方向に２２１７１ｍ移動し
た。また、印加電圧の方向を逆にした場合にも、同程度
の逆方向の変位が得られた。一方、第２図で電歪基板８
，９がなく、電歪基板１ｏだけの従来の電歪素子では開
放端の変位量は８３μｍであった。すなわち、本発明の
構成の電歪素子では従来のたわみ素子１枚だけのものに
比べて著しく大きな変位量が得られた。As a result, the position of the open end of the electrostrictive substrate 8 moved by 22171 m in the direction perpendicular to the length of the electrostrictive substrate compared to before voltage application. Furthermore, even when the direction of the applied voltage was reversed, the same degree of displacement in the opposite direction was obtained. On the other hand, in FIG.
, 9, and only the electrostrictive substrate 1o, the displacement amount of the open end was 83 μm. That is, with the electrostrictive element having the configuration of the present invention, a significantly larger amount of displacement was obtained than with the conventional one having only one flexible element.
なお、実施例では、電歪基板として圧電磁器板２枚を゛
貼り合せたものを用いだが、本発明では、これ以外に、
補強板の片側に圧電磁器板を貼り付けたもの、補強板の
両側に圧電磁器板を貼り付けたもの、および圧電磁器の
かわりにその他の圧電材料（たとえば、単結晶圧電材料
、有機圧電材料）あるいは電歪材料（たとえば、Ｐｂ（
Ｍｑ１／／３Ｎｂ２．／３）ｏ３Ｐ ｂＴ ｉＯ３系磁
器のキーリ一点付近での大きな電歪効果〔２次の効果〕
を利用したもの）を用いた電歪基板など、電圧印加によ
りたわみ変位の得らもよいし、第１図のように樹脂板あ
るいは金属板。In addition, in the embodiment, an electrostrictive substrate consisting of two piezoelectric ceramic plates bonded together was used, but in the present invention, in addition to this,
Piezoelectric ceramic plates pasted on one side of the reinforcing plate, piezoelectric ceramic plates pasted on both sides of the reinforcing plate, and other piezoelectric materials instead of piezoelectric ceramics (e.g., single-crystal piezoelectric materials, organic piezoelectric materials) or electrostrictive materials (e.g. Pb(
Mq1//3Nb2. /3) Large electrostrictive effect near one point of o3P bT iO3-based porcelain [secondary effect]
It is also possible to obtain deflection displacement by applying a voltage, such as an electrostrictive substrate using an electrostrictive substrate (using an electrostrictive substrate), or a resin plate or a metal plate as shown in Figure 1.
磁器板などを介して行なってもよい。その他、電歪基板
の固定は、金属などのバンドで行なったり、ボルト締め
などでもよい。！、た、電歪基板を３枚以上固定する際
には、固定端を第２図のように交互に逆にすることによ
り自由端のたわみ変位を大きくすることができる。なお
、電歪基板の固定部分は変位に寄与しないので電極は不
必要である。This may also be done through a porcelain plate or the like. In addition, the electrostrictive substrate may be fixed with a metal band, bolted, or the like. ! Furthermore, when three or more electrostrictive substrates are fixed, the deflection displacement of the free ends can be increased by alternately inverting the fixed ends as shown in FIG. Note that since the fixed portion of the electrostrictive substrate does not contribute to displacement, electrodes are unnecessary.
圧電材料を用いたものでは、この部分の分極処理は不要
である。If a piezoelectric material is used, polarization treatment for this portion is not necessary.
以上のように、本発明の電歪素子は比較的小形で大きな
たわみ変位を得ることができるとともに、複数の電歪基
板を適当な方法でその端部を固定することにより実現で
きるだめ量産性に富んでいること、まだ、電歪基板の枚
数を多くすることによりかなり大きなたわみ変位が得ら
れることなどの特徴があるだめ、ビデオオートトラッキ
ング用変位素子などに用いることかで・きる。As described above, the electrostrictive element of the present invention is relatively small and can obtain a large deflection displacement, and can be mass-produced by fixing the ends of a plurality of electrostrictive substrates using an appropriate method. However, it can be used as a displacement element for video auto-tracking, etc., because it has many characteristics such as the ability to obtain a considerably large deflection displacement by increasing the number of electrostrictive substrates.
１ ａ〜１ ｄ 、 １１ａ 〜１１ｆ−，，，圧電板
、２ａ〜２ｈ。
１２ａ 〜１２１ ・＝−電極、３ 、１３ａ 、 １
３ｂ−一エボキシ樹脂、４，１４・・・・支持台、６〜
１ｏ・・電歪基板。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名第１
図1a to 1d, 11a to 11f-,, piezoelectric plates, 2a to 2h. 12a to 121 ・=-electrode, 3 , 13a , 1
3b--Epoxy resin, 4, 14... Support stand, 6-
1o: Electrostrictive substrate. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
figure
Claims (4)
配置し、かつ隣接する前記電歪基板を一端で固定し、さ
らに隣接する前記電歪基板の電圧印加時のたわみ変位を
逆方向としたことを特徴とする電歪素子。(1) A plurality of electrostrictive substrates that undergo deflection displacement are arranged in parallel to each other, and the adjacent electrostrictive substrates are fixed at one end, and the deflection displacement of the adjacent electrostrictive substrates when a voltage is applied is made in the opposite direction. An electrostrictive element characterized by the following.
固定が交互に逆の一端でなされていることを特徴とする
特許請求の範囲第１項に記載の電歪素子。(2) The electrostrictive element according to claim 1, characterized in that it has at least three electrostrictive substrates, and the electrostrictive substrates are fixed alternately at opposite ends. .
固定したことを特徴とする特許請求の範囲第１項または
第２項に記載の電歪素子。(3) The electrostrictive element according to claim 1 or 2, wherein at least one end of the electrostrictive substrate is fixed to a reference.
とを特徴とする特許請求の範囲第１項まだは第２項に記
載の電歪素子。(4) The electrostrictive element according to claim 1 or 2, wherein at least the fixed portion of the electrostrictive substrate has no electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56157649A JPS5858780A (en) | 1981-10-02 | 1981-10-02 | Electrostrictive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56157649A JPS5858780A (en) | 1981-10-02 | 1981-10-02 | Electrostrictive element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5858780A true JPS5858780A (en) | 1983-04-07 |
Family
ID=15654336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56157649A Pending JPS5858780A (en) | 1981-10-02 | 1981-10-02 | Electrostrictive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5858780A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62237779A (en) * | 1986-04-08 | 1987-10-17 | Tohoku Metal Ind Ltd | Torsional displacement type piezoelectric element |
| JPH01147694U (en) * | 1988-03-31 | 1989-10-12 | ||
| US5276672A (en) * | 1990-08-16 | 1994-01-04 | Canon Kabushiki Kaisha | Micro-displacement type information detection probe device and scanning tunneling microscope, atomic force microscope, information processing device by use thereof |
| US5606162A (en) * | 1991-06-13 | 1997-02-25 | British Technology Group Limited | Microprobe for surface-scanning microscopes |
| US6560833B2 (en) * | 1998-12-04 | 2003-05-13 | Konica Corporation | Method of manufacturing ink jet head |
-
1981
- 1981-10-02 JP JP56157649A patent/JPS5858780A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62237779A (en) * | 1986-04-08 | 1987-10-17 | Tohoku Metal Ind Ltd | Torsional displacement type piezoelectric element |
| JPH01147694U (en) * | 1988-03-31 | 1989-10-12 | ||
| JPH0721115Y2 (en) * | 1988-03-31 | 1995-05-15 | 本多電子株式会社 | Ultrasonic drive |
| US5276672A (en) * | 1990-08-16 | 1994-01-04 | Canon Kabushiki Kaisha | Micro-displacement type information detection probe device and scanning tunneling microscope, atomic force microscope, information processing device by use thereof |
| US5606162A (en) * | 1991-06-13 | 1997-02-25 | British Technology Group Limited | Microprobe for surface-scanning microscopes |
| US6560833B2 (en) * | 1998-12-04 | 2003-05-13 | Konica Corporation | Method of manufacturing ink jet head |
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