WO1998007183A3 - Serpentine cross section piezoelectric actuator - Google Patents

Serpentine cross section piezoelectric actuator

Info

Publication number
WO1998007183A3
WO1998007183A3 PCT/US1997/013135 US9713135W WO9807183A3 WO 1998007183 A3 WO1998007183 A3 WO 1998007183A3 US 9713135 W US9713135 W US 9713135W WO 9807183 A3 WO9807183 A3 WO 9807183A3
Authority
WO
Grant status
Application
Patent type
Prior art keywords
ceramic
sides
ceramic layer
cross section
body
Prior art date
Application number
PCT/US1997/013135
Other languages
French (fr)
Other versions
WO1998007183A2 (en )
Inventor
Craig D Near
Brian G Pazol
Leslie J Bowen
Original Assignee
Materials Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08Piezo-electric or electrostrictive devices
    • H01L41/09Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators
    • H01L41/0986Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators using longitudinal or thickness displacement only, e.g. d33 or d31 type devices
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08Piezo-electric or electrostrictive devices
    • H01L41/09Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators
    • H01L41/0926Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H01L41/0933Beam type
    • H01L41/094Cantilevers, i.e. having one fixed end
    • H01L41/0953Cantilevers, i.e. having one fixed end with multiple segments mechanically connected in series, e.g. zig-zag type

Abstract

A serpentine cross section piezoelectric actuator (20) is disclosed. The actuator includes a unitary piezoelectric or four sides generally normal to and interconnected with the sides, and two or more ceramic layers including a top ceramic layer providing the top, a bottom ceramic layer providing the bottom, and optionally, one or more intermediate ceramic layers, the layers being disposed parallel to and superimposed over one another. Each ceramic layer except the top ceramic layer is joined at a first side to one of the ceramic layers adjacent thereto by a first ceramic bridge and each ceramic layer except the bottom ceramic layer is joined at a second side opposite the first side to another of the ceramic layers adjacent thereto by a second ceramic bridge. First (4B) and second (4B) cavities extend into the ceramic body from the first and second sides, respectively, the first cavities (4A) alternating with the second cavities (4B) in the ceramic body has a serpentine cross section. The body further includes a first electrode (22A) and a second electrode (22B) and second electrodes (22B) are disposed along and bonded to the first and second sides, respectively, of the body for activation of the actuator (20).
PCT/US1997/013135 1996-07-25 1997-07-25 Serpentine cross section piezoelectric actuator WO1998007183A3 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US2263496 true 1996-07-25 1996-07-25
US60/022,634 1996-07-25

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09041278 US6107726A (en) 1997-07-25 1998-03-11 Serpentine cross-section piezoelectric linear actuator
PCT/US1998/005917 WO1999005778A1 (en) 1997-07-25 1998-03-24 Serpentine cross-section piezoelectric linear actuator

Publications (2)

Publication Number Publication Date
WO1998007183A2 true WO1998007183A2 (en) 1998-02-19
WO1998007183A3 true true WO1998007183A3 (en) 1998-07-02

Family

ID=21810609

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1997/013135 WO1998007183A3 (en) 1996-07-25 1997-07-25 Serpentine cross section piezoelectric actuator

Country Status (1)

Country Link
WO (1) WO1998007183A3 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4220901B2 (en) * 2001-10-30 2009-02-04 1...リミテッド The piezoelectric device
GB0126372D0 (en) * 2001-11-02 2002-01-02 1 Ltd Curved electro-active actuators
GB0201458D0 (en) * 2002-01-23 2002-03-13 1 Ltd Curved electro-active actuators
US9294014B2 (en) * 2012-02-10 2016-03-22 Genziko Incorporated Power generator

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3470394A (en) * 1967-11-09 1969-09-30 Us Navy Double serrated crystal transducer
US4028566A (en) * 1975-03-03 1977-06-07 U.S. Philips Corporation Electroacoustic conversion device having a diaphragm comprising at least one of a piezoelectric polymer material
JPS55114099A (en) * 1979-02-26 1980-09-03 Nec Corp Electro-acoustic converter
JPS5851578A (en) * 1981-09-22 1983-03-26 Matsushita Electric Ind Co Ltd Piezoelectric displacement element
US4469978A (en) * 1982-09-06 1984-09-04 Kureha Kagaku Kogyo Kabushiki Kaisha Electrode arrangement for a folded polymer piezoelectric ultrasonic detector
US4752788A (en) * 1985-09-06 1988-06-21 Fuji Electric Co., Ltd. Ink jet recording head
DE3833109A1 (en) * 1988-09-29 1990-04-05 Siemens Ag Piezoelectric control element
US5173605A (en) * 1991-05-02 1992-12-22 Wyko Corporation Compact temperature-compensated tube-type scanning probe with large scan range and independent x, y, and z control
US5208880A (en) * 1992-04-30 1993-05-04 General Electric Company Microdynamical fiber-optic switch and method of switching using same
US5410207A (en) * 1992-11-26 1995-04-25 Yamaichi Electronics Co., Ltd. Piezoelectric actuator
US5440194A (en) * 1994-05-13 1995-08-08 Beurrier; Henry R. Piezoelectric actuators
US5451827A (en) * 1993-03-12 1995-09-19 Nikon Corporation Ultrasonic motor having a supporting member
US5553035A (en) * 1993-06-15 1996-09-03 Hewlett-Packard Company Method of forming integral transducer and impedance matching layers
US5633554A (en) * 1992-05-29 1997-05-27 Sumitomo Heavy Industries, Ltd. Piezoelectric linear actuator

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3470394A (en) * 1967-11-09 1969-09-30 Us Navy Double serrated crystal transducer
US4028566A (en) * 1975-03-03 1977-06-07 U.S. Philips Corporation Electroacoustic conversion device having a diaphragm comprising at least one of a piezoelectric polymer material
JPS55114099A (en) * 1979-02-26 1980-09-03 Nec Corp Electro-acoustic converter
JPS5851578A (en) * 1981-09-22 1983-03-26 Matsushita Electric Ind Co Ltd Piezoelectric displacement element
US4469978A (en) * 1982-09-06 1984-09-04 Kureha Kagaku Kogyo Kabushiki Kaisha Electrode arrangement for a folded polymer piezoelectric ultrasonic detector
US4752788A (en) * 1985-09-06 1988-06-21 Fuji Electric Co., Ltd. Ink jet recording head
DE3833109A1 (en) * 1988-09-29 1990-04-05 Siemens Ag Piezoelectric control element
US5173605A (en) * 1991-05-02 1992-12-22 Wyko Corporation Compact temperature-compensated tube-type scanning probe with large scan range and independent x, y, and z control
US5208880A (en) * 1992-04-30 1993-05-04 General Electric Company Microdynamical fiber-optic switch and method of switching using same
US5633554A (en) * 1992-05-29 1997-05-27 Sumitomo Heavy Industries, Ltd. Piezoelectric linear actuator
US5410207A (en) * 1992-11-26 1995-04-25 Yamaichi Electronics Co., Ltd. Piezoelectric actuator
US5451827A (en) * 1993-03-12 1995-09-19 Nikon Corporation Ultrasonic motor having a supporting member
US5553035A (en) * 1993-06-15 1996-09-03 Hewlett-Packard Company Method of forming integral transducer and impedance matching layers
US5440194A (en) * 1994-05-13 1995-08-08 Beurrier; Henry R. Piezoelectric actuators

Also Published As

Publication number Publication date Type
WO1998007183A2 (en) 1998-02-19 application

Similar Documents

Publication Publication Date Title
USD427056S (en) Container blank for adhesively secured flat bottom bag
USD423690S (en) Panel connecting and finishing strip
US4944076A (en) Corrugated fiberboard casket lids
US5040092A (en) Multilayer capacitor
USD430015S (en) Blister pack for a syringe
USD297297S (en) Pan separator
USD401306S (en) Filter element
USD418603S (en) Power column
USD471641S1 (en) Surgical kit tray
US5614044A (en) Method of manufacturing a laminated ceramic device
USD312128S (en) Bowl body for centrifuge
USD387439S (en) Veneer panel
US6043587A (en) Piezoelectric actuator
USD380647S (en) Glass
USD402758S (en) Automated external defibrillator
USD330970S (en) Shoe midsole
USD472633S1 (en) Bone implant
USD431215S (en) Anti-skid stud for vehicle tire
USD280363S (en) Photograph display frame
JPH01206615A (en) Laminated through-type capacitor
JPS6461111A (en) Composite parts comprising piezoelectric resonator and capacitor
USD479242S1 (en) Oil damper
USD274588S (en) Surfacing unit
USD315241S (en) Decorated layered cookie
USD291757S (en) Plate

Legal Events

Date Code Title Description
AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LU MC NL PT SE

AK Designated states

Kind code of ref document: A2

Designated state(s): JP

121 Ep: the epo has been informed by wipo that ep was designated in this application
AL Designated countries for regional patents

Kind code of ref document: A3

Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LU MC NL PT SE

AK Designated states

Kind code of ref document: A3

Designated state(s): JP

COP Corrected version of pamphlet

Free format text: PAGES 1/10-2/10 AND 6/10-10/10, DRAWINGS, REPLACED BY NEW PAGES 1/11-2/11 AND 6/11-11/11; PAGES 3/10-5/10 RENUMBERED AS PAGES 3/11-5/11; DUE TO LATE TRANSMITTAL BY THE RECEIVING OFFICE

NENP Non-entry into the national phase in:

Ref country code: JP

Ref document number: 98509757

Format of ref document f/p: F

122 Ep: pct application non-entry in european phase