JPS5864038A - ボンデイングプレ−ト - Google Patents
ボンデイングプレ−トInfo
- Publication number
- JPS5864038A JPS5864038A JP56163010A JP16301081A JPS5864038A JP S5864038 A JPS5864038 A JP S5864038A JP 56163010 A JP56163010 A JP 56163010A JP 16301081 A JP16301081 A JP 16301081A JP S5864038 A JPS5864038 A JP S5864038A
- Authority
- JP
- Japan
- Prior art keywords
- bonding
- vacuum
- semiconductor element
- plate
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims abstract description 34
- 239000000758 substrate Substances 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 abstract description 3
- 238000006073 displacement reaction Methods 0.000 abstract 1
- 239000011368 organic material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 15
- 235000012431 wafers Nutrition 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 235000012012 Paullinia yoco Nutrition 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000005453 pelletization Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/79—Apparatus for Tape Automated Bonding [TAB]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/50—Tape automated bonding [TAB] connectors, i.e. film carriers; Manufacturing methods related thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/86—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using tape automated bonding [TAB]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56163010A JPS5864038A (ja) | 1981-10-13 | 1981-10-13 | ボンデイングプレ−ト |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56163010A JPS5864038A (ja) | 1981-10-13 | 1981-10-13 | ボンデイングプレ−ト |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5864038A true JPS5864038A (ja) | 1983-04-16 |
JPS6250057B2 JPS6250057B2 (enrdf_load_stackoverflow) | 1987-10-22 |
Family
ID=15765474
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56163010A Granted JPS5864038A (ja) | 1981-10-13 | 1981-10-13 | ボンデイングプレ−ト |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5864038A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0316237A (ja) * | 1989-06-14 | 1991-01-24 | Toshiba Seiki Kk | インナーリードボンダ |
CN106068555A (zh) * | 2014-03-19 | 2016-11-02 | 信越半导体株式会社 | 工件支承装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02117879U (enrdf_load_stackoverflow) * | 1989-03-06 | 1990-09-20 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5776850A (en) * | 1980-10-30 | 1982-05-14 | Nec Corp | Manufacture device for semiconductor device |
JPS5832426A (ja) * | 1981-08-20 | 1983-02-25 | Seiko Epson Corp | インナ−リ−ドボンダ−の集積回路チツプ受台 |
-
1981
- 1981-10-13 JP JP56163010A patent/JPS5864038A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5776850A (en) * | 1980-10-30 | 1982-05-14 | Nec Corp | Manufacture device for semiconductor device |
JPS5832426A (ja) * | 1981-08-20 | 1983-02-25 | Seiko Epson Corp | インナ−リ−ドボンダ−の集積回路チツプ受台 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0316237A (ja) * | 1989-06-14 | 1991-01-24 | Toshiba Seiki Kk | インナーリードボンダ |
CN106068555A (zh) * | 2014-03-19 | 2016-11-02 | 信越半导体株式会社 | 工件支承装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6250057B2 (enrdf_load_stackoverflow) | 1987-10-22 |
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