JPS5864038A - ボンデイングプレ−ト - Google Patents

ボンデイングプレ−ト

Info

Publication number
JPS5864038A
JPS5864038A JP56163010A JP16301081A JPS5864038A JP S5864038 A JPS5864038 A JP S5864038A JP 56163010 A JP56163010 A JP 56163010A JP 16301081 A JP16301081 A JP 16301081A JP S5864038 A JPS5864038 A JP S5864038A
Authority
JP
Japan
Prior art keywords
bonding
vacuum
semiconductor element
plate
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56163010A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6250057B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Aoyama
弘 青山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56163010A priority Critical patent/JPS5864038A/ja
Publication of JPS5864038A publication Critical patent/JPS5864038A/ja
Publication of JPS6250057B2 publication Critical patent/JPS6250057B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/79Apparatus for Tape Automated Bonding [TAB]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/50Tape automated bonding [TAB] connectors, i.e. film carriers; Manufacturing methods related thereto
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/86Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using tape automated bonding [TAB]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01082Lead [Pb]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)
JP56163010A 1981-10-13 1981-10-13 ボンデイングプレ−ト Granted JPS5864038A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56163010A JPS5864038A (ja) 1981-10-13 1981-10-13 ボンデイングプレ−ト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56163010A JPS5864038A (ja) 1981-10-13 1981-10-13 ボンデイングプレ−ト

Publications (2)

Publication Number Publication Date
JPS5864038A true JPS5864038A (ja) 1983-04-16
JPS6250057B2 JPS6250057B2 (enrdf_load_stackoverflow) 1987-10-22

Family

ID=15765474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56163010A Granted JPS5864038A (ja) 1981-10-13 1981-10-13 ボンデイングプレ−ト

Country Status (1)

Country Link
JP (1) JPS5864038A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0316237A (ja) * 1989-06-14 1991-01-24 Toshiba Seiki Kk インナーリードボンダ
CN106068555A (zh) * 2014-03-19 2016-11-02 信越半导体株式会社 工件支承装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02117879U (enrdf_load_stackoverflow) * 1989-03-06 1990-09-20

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5776850A (en) * 1980-10-30 1982-05-14 Nec Corp Manufacture device for semiconductor device
JPS5832426A (ja) * 1981-08-20 1983-02-25 Seiko Epson Corp インナ−リ−ドボンダ−の集積回路チツプ受台

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5776850A (en) * 1980-10-30 1982-05-14 Nec Corp Manufacture device for semiconductor device
JPS5832426A (ja) * 1981-08-20 1983-02-25 Seiko Epson Corp インナ−リ−ドボンダ−の集積回路チツプ受台

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0316237A (ja) * 1989-06-14 1991-01-24 Toshiba Seiki Kk インナーリードボンダ
CN106068555A (zh) * 2014-03-19 2016-11-02 信越半导体株式会社 工件支承装置

Also Published As

Publication number Publication date
JPS6250057B2 (enrdf_load_stackoverflow) 1987-10-22

Similar Documents

Publication Publication Date Title
US10770350B2 (en) Method of separating a back layer on a singulated semiconductor wafer attached to carrier substrate
EP0182218A2 (en) Method for dicing semiconductor wafer
JPH11163006A (ja) ペレットボンディング方法
JPS5864038A (ja) ボンデイングプレ−ト
JPH08227904A (ja) チップボンディング装置
EP0177563B1 (en) Robot gripper for integrated circuit leadframes
US20050204554A1 (en) Method for processing electrical components, especially semiconductor chips, and device for carrying out the method
JP2002368023A (ja) 半導体装置の製造方法
JP2005019571A (ja) チップの実装方法及び実装基板の製造装置
KR20050095101A (ko) 다이 부착 공정에서 얇은 두께의 칩을 픽업하는 픽업 장치
JP2736637B2 (ja) チップボンディング方法
JP3208580B2 (ja) ダイボンディング方法及び半導体装置の製造方法
JP2000091403A (ja) ダイピックアップ方法およびそれを用いた半導体製造装置ならびに半導体装置の製造方法
JP3114274B2 (ja) バンプ電極形成方法
JPH0451056B2 (enrdf_load_stackoverflow)
JP2672787B2 (ja) 半導体装置の製造方法
JPS58165335A (ja) テ−プキヤリア方式による半導体装置の製造方法及びその製造装置
CN119542194A (zh) 一种芯片封装系统
JPS59111338A (ja) 回路基板への半導体素子の接着方法
KR100196900B1 (ko) Loc 방식 및 dca 방식의 반도체 디바이스에 적합한 웨이퍼 가공방법
JPH0661310A (ja) リード、tabテープ、tabテープの製造方法、リードと被接合体との接合方法、ならびにtabテープと半導体チップとの接合方法および接合装置
JPS60224236A (ja) 半導体装置の製造方法
JPH11243105A (ja) バンプ形成方法
JPH11204582A (ja) バンプ付きテープの製造方法及び半導体チップの製造方法並びにバンプ形成装置
JPS5929431A (ja) リ−ド修正方法