JPS5863147A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS5863147A
JPS5863147A JP56161336A JP16133681A JPS5863147A JP S5863147 A JPS5863147 A JP S5863147A JP 56161336 A JP56161336 A JP 56161336A JP 16133681 A JP16133681 A JP 16133681A JP S5863147 A JPS5863147 A JP S5863147A
Authority
JP
Japan
Prior art keywords
fuse element
guard ring
substrate
type
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56161336A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6351382B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Yukimasa Uchida
内田　幸正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56161336A priority Critical patent/JPS5863147A/ja
Priority to DE8282108975T priority patent/DE3276981D1/de
Priority to EP82108975A priority patent/EP0076967B1/en
Publication of JPS5863147A publication Critical patent/JPS5863147A/ja
Priority to US06/910,850 priority patent/US4723155A/en
Publication of JPS6351382B2 publication Critical patent/JPS6351382B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/525—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
    • H01L23/5256—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising fuses, i.e. connections having their state changed from conductive to non-conductive
    • H01L23/5258—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising fuses, i.e. connections having their state changed from conductive to non-conductive the change of state resulting from the use of an external beam, e.g. laser beam or ion beam

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP56161336A 1981-10-09 1981-10-09 半導体装置 Granted JPS5863147A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP56161336A JPS5863147A (ja) 1981-10-09 1981-10-09 半導体装置
DE8282108975T DE3276981D1 (en) 1981-10-09 1982-09-28 Semiconductor device having a fuse element
EP82108975A EP0076967B1 (en) 1981-10-09 1982-09-28 Semiconductor device having a fuse element
US06/910,850 US4723155A (en) 1981-10-09 1986-09-24 Semiconductor device having a programmable fuse element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56161336A JPS5863147A (ja) 1981-10-09 1981-10-09 半導体装置

Publications (2)

Publication Number Publication Date
JPS5863147A true JPS5863147A (ja) 1983-04-14
JPS6351382B2 JPS6351382B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-10-13

Family

ID=15733139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56161336A Granted JPS5863147A (ja) 1981-10-09 1981-10-09 半導体装置

Country Status (1)

Country Link
JP (1) JPS5863147A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61194740A (ja) * 1985-02-25 1986-08-29 Hitachi Ltd 半導体装置
JP2004515061A (ja) * 2000-11-27 2004-05-20 コーニンクレッカ　フィリップス　エレクトロニクス　エヌ　ヴィ Ｍｏｓデバイスベースのセル構造を有するポリヒューズｒｏｍ、及びそれに対する読出しと書込みの方法
JP2006080411A (ja) * 2004-09-13 2006-03-23 Oki Electric Ind Co Ltd 半導体装置
US7270373B2 (en) 2005-08-24 2007-09-18 Takata Corporation Child car seat
JP2008066693A (ja) * 2006-08-11 2008-03-21 Renesas Technology Corp 半導体集積回路
JP2017045839A (ja) * 2015-08-26 2017-03-02 ルネサスエレクトロニクス株式会社 半導体装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51113476A (en) * 1975-03-31 1976-10-06 Fujitsu Ltd Semiconductor device manufacturing system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51113476A (en) * 1975-03-31 1976-10-06 Fujitsu Ltd Semiconductor device manufacturing system

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61194740A (ja) * 1985-02-25 1986-08-29 Hitachi Ltd 半導体装置
JP2004515061A (ja) * 2000-11-27 2004-05-20 コーニンクレッカ　フィリップス　エレクトロニクス　エヌ　ヴィ Ｍｏｓデバイスベースのセル構造を有するポリヒューズｒｏｍ、及びそれに対する読出しと書込みの方法
JP2006080411A (ja) * 2004-09-13 2006-03-23 Oki Electric Ind Co Ltd 半導体装置
US7270373B2 (en) 2005-08-24 2007-09-18 Takata Corporation Child car seat
JP2008066693A (ja) * 2006-08-11 2008-03-21 Renesas Technology Corp 半導体集積回路
JP2017045839A (ja) * 2015-08-26 2017-03-02 ルネサスエレクトロニクス株式会社 半導体装置

Also Published As

Publication number Publication date
JPS6351382B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-10-13

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