JPS5861448A - パタ−ン検査方式 - Google Patents

パタ−ン検査方式

Info

Publication number
JPS5861448A
JPS5861448A JP16017081A JP16017081A JPS5861448A JP S5861448 A JPS5861448 A JP S5861448A JP 16017081 A JP16017081 A JP 16017081A JP 16017081 A JP16017081 A JP 16017081A JP S5861448 A JPS5861448 A JP S5861448A
Authority
JP
Japan
Prior art keywords
pattern
patterns
contracted
standard
inspection method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16017081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS642218B2 (OSRAM
Inventor
Toshimitsu Hamada
浜田　利満
Kazushi Yoshimura
和士 吉村
Tomohiro Kuji
久迩　朝宏
Nobuhiko Aoki
信彦 青木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP16017081A priority Critical patent/JPS5861448A/ja
Publication of JPS5861448A publication Critical patent/JPS5861448A/ja
Publication of JPS642218B2 publication Critical patent/JPS642218B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Character Discrimination (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP16017081A 1981-10-09 1981-10-09 パタ−ン検査方式 Granted JPS5861448A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16017081A JPS5861448A (ja) 1981-10-09 1981-10-09 パタ−ン検査方式

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16017081A JPS5861448A (ja) 1981-10-09 1981-10-09 パタ−ン検査方式

Publications (2)

Publication Number Publication Date
JPS5861448A true JPS5861448A (ja) 1983-04-12
JPS642218B2 JPS642218B2 (OSRAM) 1989-01-17

Family

ID=15709362

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16017081A Granted JPS5861448A (ja) 1981-10-09 1981-10-09 パタ−ン検査方式

Country Status (1)

Country Link
JP (1) JPS5861448A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61251705A (ja) * 1985-04-30 1986-11-08 Sumitomo Metal Ind Ltd パタ−ン検査方法及び装置
JPS62249037A (ja) * 1986-04-21 1987-10-30 Shigumatsukusu Kk 物体認識装置
JPH07121706A (ja) * 1993-10-21 1995-05-12 Asia Electron Inc 画像認識装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5368847A (en) * 1976-12-01 1978-06-19 Hitachi Ltd Automatic appearance inspecting device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5368847A (en) * 1976-12-01 1978-06-19 Hitachi Ltd Automatic appearance inspecting device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61251705A (ja) * 1985-04-30 1986-11-08 Sumitomo Metal Ind Ltd パタ−ン検査方法及び装置
JPS62249037A (ja) * 1986-04-21 1987-10-30 Shigumatsukusu Kk 物体認識装置
JPH07121706A (ja) * 1993-10-21 1995-05-12 Asia Electron Inc 画像認識装置

Also Published As

Publication number Publication date
JPS642218B2 (OSRAM) 1989-01-17

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