JPS5859395A - タ−ボ分子ポンプ - Google Patents

タ−ボ分子ポンプ

Info

Publication number
JPS5859395A
JPS5859395A JP15905681A JP15905681A JPS5859395A JP S5859395 A JPS5859395 A JP S5859395A JP 15905681 A JP15905681 A JP 15905681A JP 15905681 A JP15905681 A JP 15905681A JP S5859395 A JPS5859395 A JP S5859395A
Authority
JP
Japan
Prior art keywords
blades
pump
shaft
rotor
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15905681A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0240879B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Tomoaki Urano
浦野　智秋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP15905681A priority Critical patent/JPS5859395A/ja
Publication of JPS5859395A publication Critical patent/JPS5859395A/ja
Publication of JPH0240879B2 publication Critical patent/JPH0240879B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/024—Multi-stage pumps with contrarotating parts

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP15905681A 1981-10-06 1981-10-06 タ−ボ分子ポンプ Granted JPS5859395A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15905681A JPS5859395A (ja) 1981-10-06 1981-10-06 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15905681A JPS5859395A (ja) 1981-10-06 1981-10-06 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS5859395A true JPS5859395A (ja) 1983-04-08
JPH0240879B2 JPH0240879B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-09-13

Family

ID=15685253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15905681A Granted JPS5859395A (ja) 1981-10-06 1981-10-06 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS5859395A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003031823A1 (de) * 2001-10-06 2003-04-17 Leybold Vakuum Gmbh Axial fördernde reibungsvakuumpumpe

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3044685A (en) * 1959-02-13 1962-07-17 Nicholas P Lapiken Air compressor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3044685A (en) * 1959-02-13 1962-07-17 Nicholas P Lapiken Air compressor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003031823A1 (de) * 2001-10-06 2003-04-17 Leybold Vakuum Gmbh Axial fördernde reibungsvakuumpumpe

Also Published As

Publication number Publication date
JPH0240879B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-09-13

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