JPS5853836A - 有機樹脂材料の付着性を増すための方法 - Google Patents
有機樹脂材料の付着性を増すための方法Info
- Publication number
- JPS5853836A JPS5853836A JP57104024A JP10402482A JPS5853836A JP S5853836 A JPS5853836 A JP S5853836A JP 57104024 A JP57104024 A JP 57104024A JP 10402482 A JP10402482 A JP 10402482A JP S5853836 A JPS5853836 A JP S5853836A
- Authority
- JP
- Japan
- Prior art keywords
- organic resin
- substrate
- resin material
- adhesion
- organophosphine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 14
- 239000011347 resin Substances 0.000 title claims description 13
- 229920005989 resin Polymers 0.000 title claims description 13
- 239000000463 material Substances 0.000 title claims description 9
- 239000000758 substrate Substances 0.000 claims description 16
- 238000000151 deposition Methods 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000002318 adhesion promoter Substances 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- OZHUWVSXUOMDDU-UHFFFAOYSA-N tris(ethenyl)phosphane Chemical compound C=CP(C=C)C=C OZHUWVSXUOMDDU-UHFFFAOYSA-N 0.000 description 2
- 241000597318 Hercus Species 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000010420 art technique Methods 0.000 description 1
- GEKAWPIATFUQJW-UHFFFAOYSA-N bis(ethenyl)-phenylphosphane Chemical compound C=CP(C=C)C1=CC=CC=C1 GEKAWPIATFUQJW-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- AJVBXLXLODZUME-UHFFFAOYSA-N ethenyl(diphenyl)phosphane Chemical compound C=1C=CC=CC=1P(C=C)C1=CC=CC=C1 AJVBXLXLODZUME-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/52—Polymerisation initiated by wave energy or particle radiation by electric discharge, e.g. voltolisation
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F30/00—Homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and containing phosphorus, selenium, tellurium or a metal
- C08F30/02—Homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and containing phosphorus, selenium, tellurium or a metal containing phosphorus
Landscapes
- Chemical & Material Sciences (AREA)
- Medicinal Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Formation Of Insulating Films (AREA)
- Physical Vapour Deposition (AREA)
- Polymerisation Methods In General (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/299,273 US4371565A (en) | 1981-09-04 | 1981-09-04 | Process for adhering an organic resin to a substrate by means of plasma polymerized phosphines |
| US299273 | 1981-09-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5853836A true JPS5853836A (ja) | 1983-03-30 |
| JPS6362093B2 JPS6362093B2 (enExample) | 1988-12-01 |
Family
ID=23154081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57104024A Granted JPS5853836A (ja) | 1981-09-04 | 1982-06-18 | 有機樹脂材料の付着性を増すための方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4371565A (enExample) |
| EP (1) | EP0073924B1 (enExample) |
| JP (1) | JPS5853836A (enExample) |
| CA (1) | CA1184149A (enExample) |
| DE (1) | DE3275632D1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4497890A (en) * | 1983-04-08 | 1985-02-05 | Motorola, Inc. | Process for improving adhesion of resist to gold |
| IT1191646B (it) * | 1985-12-19 | 1988-03-23 | Montedison Spa | Processo per l'adesione di poli-p.xililene a substrati e articoli ottenuti |
| US5856380A (en) * | 1993-12-16 | 1999-01-05 | Ciba Specialty Chemical Corporation | Process for flame-proofing organic polymeric materials |
| KR100325526B1 (ko) * | 1998-10-26 | 2002-04-17 | 윤종용 | 잉크 분사 장치의 제조 방법 |
| JP5432602B2 (ja) * | 2008-06-25 | 2014-03-05 | 富士フイルム株式会社 | バリア性積層体、ガスバリアフィルム、デバイス |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3387991A (en) * | 1964-10-13 | 1968-06-11 | Rexall Drug Chemical | Glow discharge polymerization coating of polyolefin surfaces to render them receptive to adhesives, inks, and the like |
| GB1146550A (en) * | 1966-07-26 | 1969-03-26 | Standard Telephones Cables Ltd | Polymeric product preparation method |
| JPS53109703A (en) * | 1977-03-08 | 1978-09-25 | Teijin Ltd | Improved supporting plate |
| US4176003A (en) * | 1978-02-22 | 1979-11-27 | Ncr Corporation | Method for enhancing the adhesion of photoresist to polysilicon |
| US4279723A (en) * | 1978-08-18 | 1981-07-21 | The Regents Of The University Of California | Polymerization of inorganic element-containing monomers using plasma |
| US4283481A (en) * | 1978-09-11 | 1981-08-11 | Napp Systems (Usa) Inc. | Element having phosphine activated photosensitive compositions therein |
| JPS6053675B2 (ja) * | 1978-09-20 | 1985-11-27 | 富士写真フイルム株式会社 | スピンコ−テイング方法 |
-
1981
- 1981-09-04 US US06/299,273 patent/US4371565A/en not_active Expired - Lifetime
-
1982
- 1982-06-18 JP JP57104024A patent/JPS5853836A/ja active Granted
- 1982-07-15 CA CA000407313A patent/CA1184149A/en not_active Expired
- 1982-07-30 DE DE8282106896T patent/DE3275632D1/de not_active Expired
- 1982-07-30 EP EP82106896A patent/EP0073924B1/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CA1184149A (en) | 1985-03-19 |
| EP0073924B1 (en) | 1987-03-11 |
| JPS6362093B2 (enExample) | 1988-12-01 |
| DE3275632D1 (en) | 1987-04-16 |
| EP0073924A3 (en) | 1984-03-28 |
| EP0073924A2 (en) | 1983-03-16 |
| US4371565A (en) | 1983-02-01 |
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