JPS5852512A - 光学式形状測定装置 - Google Patents

光学式形状測定装置

Info

Publication number
JPS5852512A
JPS5852512A JP15035981A JP15035981A JPS5852512A JP S5852512 A JPS5852512 A JP S5852512A JP 15035981 A JP15035981 A JP 15035981A JP 15035981 A JP15035981 A JP 15035981A JP S5852512 A JPS5852512 A JP S5852512A
Authority
JP
Japan
Prior art keywords
signal
measured
phase
substance
optical sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15035981A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6310761B2 (enrdf_load_stackoverflow
Inventor
Yutaka Ono
裕 小野
Hajime Kuwabara
一 桑原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp, Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Electric Corp
Priority to JP15035981A priority Critical patent/JPS5852512A/ja
Publication of JPS5852512A publication Critical patent/JPS5852512A/ja
Publication of JPS6310761B2 publication Critical patent/JPS6310761B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP15035981A 1981-09-22 1981-09-22 光学式形状測定装置 Granted JPS5852512A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15035981A JPS5852512A (ja) 1981-09-22 1981-09-22 光学式形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15035981A JPS5852512A (ja) 1981-09-22 1981-09-22 光学式形状測定装置

Publications (2)

Publication Number Publication Date
JPS5852512A true JPS5852512A (ja) 1983-03-28
JPS6310761B2 JPS6310761B2 (enrdf_load_stackoverflow) 1988-03-09

Family

ID=15495260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15035981A Granted JPS5852512A (ja) 1981-09-22 1981-09-22 光学式形状測定装置

Country Status (1)

Country Link
JP (1) JPS5852512A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63161856A (ja) * 1986-12-22 1988-07-05 Nippon Densan Kk デイスク用スピンドルモ−タ
JPH02132358U (enrdf_load_stackoverflow) * 1989-03-31 1990-11-02

Also Published As

Publication number Publication date
JPS6310761B2 (enrdf_load_stackoverflow) 1988-03-09

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