JPS584920Y2 - 酸化亜鉛薄膜の製造装置 - Google Patents

酸化亜鉛薄膜の製造装置

Info

Publication number
JPS584920Y2
JPS584920Y2 JP1978115320U JP11532078U JPS584920Y2 JP S584920 Y2 JPS584920 Y2 JP S584920Y2 JP 1978115320 U JP1978115320 U JP 1978115320U JP 11532078 U JP11532078 U JP 11532078U JP S584920 Y2 JPS584920 Y2 JP S584920Y2
Authority
JP
Japan
Prior art keywords
thin film
zinc
zinc oxide
substrate
oxygen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978115320U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5533919U (enrdf_load_stackoverflow
Inventor
溝口俊巳
高久哲郎
高木俊宜
松原覚衛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toko Inc
Original Assignee
Toko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toko Inc filed Critical Toko Inc
Priority to JP1978115320U priority Critical patent/JPS584920Y2/ja
Publication of JPS5533919U publication Critical patent/JPS5533919U/ja
Application granted granted Critical
Publication of JPS584920Y2 publication Critical patent/JPS584920Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Physical Vapour Deposition (AREA)
JP1978115320U 1978-08-23 1978-08-23 酸化亜鉛薄膜の製造装置 Expired JPS584920Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978115320U JPS584920Y2 (ja) 1978-08-23 1978-08-23 酸化亜鉛薄膜の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978115320U JPS584920Y2 (ja) 1978-08-23 1978-08-23 酸化亜鉛薄膜の製造装置

Publications (2)

Publication Number Publication Date
JPS5533919U JPS5533919U (enrdf_load_stackoverflow) 1980-03-05
JPS584920Y2 true JPS584920Y2 (ja) 1983-01-27

Family

ID=29066846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978115320U Expired JPS584920Y2 (ja) 1978-08-23 1978-08-23 酸化亜鉛薄膜の製造装置

Country Status (1)

Country Link
JP (1) JPS584920Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5989763A (ja) * 1983-09-28 1984-05-24 Ricoh Co Ltd 薄膜蒸着装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS549592B2 (enrdf_load_stackoverflow) * 1972-07-29 1979-04-25
JPS5152041U (enrdf_load_stackoverflow) * 1974-10-18 1976-04-20
JPS5489983A (en) * 1977-12-28 1979-07-17 Toshiba Corp Device and method for vacuum deposition compound

Also Published As

Publication number Publication date
JPS5533919U (enrdf_load_stackoverflow) 1980-03-05

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